双面抛光机床抛光盘静动态特性分析  

Analysis on static and dynamic characteristics of double-sided polishing machine tool's polishing disc

作　　者：郭海林 王大森[2] 夏超翔[2] 张旭 裴宁 GUO Hailin;WANG Dasen;XIA Chaoxiang;ZHANG Xu;PEI Ning(School of Mechanical Engineering,Nanjing University of Science and Technology,Nanjing 210094;Ningbo Branch,China Academy of Ordnance Science,Ningbo 315103)

机构地区：[1]南京理工大学机械工程学院,江苏南京210094 [2]中国兵器科学研究院宁波分院,浙江宁波315103

出　　处：《机械设计》2023年第11期88-92,共5页Journal of Machine Design

基　　金：国防基础科研计划(JCKY2016208A002)。

摘　　要：为解决传统抛光方法上下表面平行度无法保证和形成工件规律性同轴圆环痕迹的难题,文中设计了工件旋转和二维运动独立控制的大口径光学元件双面快速抛光机床。采用ABAQUS有限元软件对其关键结构件抛光盘组件的静动态特性进行了仿真分析。结果表明:加载后抛光盘最大等效应力为12.63 MPa,最大形变量为8.26μm,能够满足工作精度和工作强度的要求;通过模态仿真计算出抛光盘组件的固有频率高于79 Hz,工作中不会出现共振情况,所建立的仿真模型为抛光盘组件的研制提供了理论参考。As for the traditional polishing method,the parallelism of the upper and lower surfaces cannot be guaranteed and the workpieces suffer regular co-axial ring marks,a large-diameter optical-element double-sided rapid polishing machine tool with the independent control of workpiece rotation and two-dimensional motion is designed.The polishing disc's static and dynamic characteristics are simulated with the help of the ABAQUS finite-element software.The results show that after the polishing disc is loaded,the maximum equivalent stress is 12.63 MPa and the maximum deformation is 8.26μm,which can meet the requirements of precision and strength.Through modal simulation,it is calculated that the polishing disc module's natural frequency is greater than 79 Hz,and there is no resonance.The simulation model provides theoretical reference for the development of polishing disc modules.

关 键 词：双面抛光 ABAQUS 抛光盘 静动态特性 仿真分析 

分 类 号：TH122[机械工程—机械设计及理论]