宽波段平场复消色差显微物镜设计  

Lens Design of the Broadband Plan-apochromatic Microscope Objective

作　　者：管鱼龙 郑小兵 翟文超 GUAN Yulong;ZHENG Xiaobing;ZHAI Wenchao(School of Physical Sciences,University of Science and Technology of China,Hefei 230026,China;Key Laboratory of Optical Calibration and Characterization,Anhui Institute of Optics and Fine Mechanics,Hefei Institutes of Physical Science,Chinese Academy of Sciences,Hefei 230031,China)

机构地区：[1]中国科学技术大学物理学院,合肥230026 [2]中国科学院合肥物质科学研究院安徽光学精密机械研究所中国科学院通用光学定标与表征技术重点实验室,合肥230031

出　　处：《光子学报》2023年第12期69-80,共12页Acta Photonica Sinica

基　　金：国家重点研发计划(No.2022YFB3903101);中国科学院合肥物质科学研究院院长基金(No.YZJJ202201-CX)。

摘　　要：目前商品化的显微物镜的适用波段范围无法满足360~1000 nm波段范围的相关光子光斑的测量要求。从复消色差基础理论出发,研究了复消色差玻璃组合的选择方法,得到了二级光谱校正效果较好的玻璃组合。采用全球面折射式、无穷远校正的结构型式,设计出一款放大倍率为20倍、数值孔径为0.3、工作距离为10 mm、齐焦距为60 mm、视场为0.66 mm、工作波长范围为360~1000 nm的平场复消色差显微物镜。调制传递函数曲线在80 lp/mm处接近衍射极限,场曲校正满足平场的国际标准,其余成像指标也接近衍射极限。公差分析结果表明,该显微物镜满足设计和实际加工要求。In the field of optical engineering,microscopic imaging measurement is an important means of optical installation and adjustment.To realize correlated photon imaging measurement and auxiliary monitoring in the process of correlated photon radiation reference source optical path system installation and adjustment,it is necessary to establish a microscopic imaging system with a broad spectrum spanning of 360~1000 nm.Some scholars at home and abroad have designed a series of finite conjugate or infinite corrected objective lenses with high numerical aperture,large field of view,broad spectrum coverage,high magnification,et al.There are also a variety of commercial microscopic objective lenses,but the correlated photons band to be measured is beyond the applicable band range of current commercial microscopic objective lenses.A broadband plan-apochromatic microscope objective was designed in this study.The design of broadband microscope objective needs to consider the problem of apochromatism firstly.The apochromatism of refractive microscope objective is mainly realized by the diffractive optical elements or the combination of different glass materials,the diffractive optical elements are not suitable for precision optical systems,so the glass combination method is used for the design of apochromatic microscope objective.Based on the basic apochromatic theory,the model of compact three-piece lenses was selected,then was realized through a program script with MATLAB®software.The glass material chooses domestic CDGM glass library.Firstly,according to the range of wavelength,glass production frequency,price,and other indicators of the glass library for initial screening,the original glass library has a total of 304 kinds of glass,the final remaining 25 kinds of glass after the initial screening.Then,the least square method is used to calculate the optimal focal power allocation of each glass combination,and the glass combination is selected by the sum of the absolute focal power and the corresponding minimum residual c

关 键 词：光学设计 显微成像 显微物镜 平场复消色差 宽光谱范围 相关光子 装调 

分 类 号：TH742[机械工程—光学工程]