电子束熔炼在制备高纯材料中的应用  

Application of Electron-beam Smelting on Preparation of High-purity Materials

作　　者：李小英 林琳 杨妮 杨振 彭学斌 LI Xiao-ying;LIN Lin;YANG Ni;YANG Zhen;PENG Xue-bin(Kunming Metallurgical Research Institute Co.,Ltd.,Kunming,Yunnan 650031,China)

机构地区：[1]昆明冶金研究院有限公司,云南昆明650031

出　　处：《云南冶金》2023年第6期85-89,共5页Yunnan Metallurgy

基　　金：重大科技专项计划(202102AB080005);中国铜业重点研发科技专项(ZT2111);云南省新材料专项(202202AB080015)。

摘　　要：电子束熔炼技术是目前熔炼提纯高洁净材料的有效手段。简述了电子束炉熔炼的原理和特点,对电子束熔炼去除稀土金属中的杂质规律研究和对电子束熔炼去除难熔金属、有色金属、非金属中的杂质及获得最佳工艺技术参数研究进行了综述,指出电子束熔炼技术在制备半导体芯片高纯材料上的应用具有广阔前景。Electron-beam smelting is an effective means for melting high-purity materials at present.It simply introduced the principle and features of an electron beam furnace,it summarized the law for study of impurities removal from rare earth metal by electron beam smelting,and impurities removal from refractory metals,nonferrous metals,nonmetal,and the best process technical parameters,it is pointed out the electron beam furnace technology has wide prospects for the preparation of semiconductor chip high-purity materials.

关 键 词：电子束 熔炼 高纯 去除 

分 类 号：TF134[冶金工程—冶金物理化学]