La掺杂对Y_(2)O_(3)/Diamond薄膜结构与性能的影响  

Effect of La doping on structure and properties of Y_(2)O_(3)/Diamond films

作　　者：操淑琴 黄亚博 陈良贤 刘金龙 魏俊俊 廉伟艳 赵志宏 杨振京 陈晓依 彭志勇 邢忠福 李成明 Cao Shuqin;Huang Yabo;Chen Liangxian;Liu Jinlong;Wei Junjun;Lian Weiyan;Zhao Zhihong;Yang Zhenjing;Chen Xiaoyi;Peng Zhiyong;Xing Zhongfu;Li Chengming(Institute for Advanced Materials and Technology,University of Science and Technology Beijing,Beijing 100083,China;Henan Key Laboratory of Aeronautical Material and Applied Technology,Zhengzhou University of Aeronautics,Zhengzhou 450046,China;Tianjin Jinhang Institute of Technical Physics,Tianjin 300308,China)

机构地区：[1]北京科技大学新材料技术研究院,北京100083 [2]郑州航空工业管理学院河南省航空材料与应用技术重点实验室,河南郑州450046 [3]天津津航物理技术研究所,天津300308

出　　处：《红外与激光工程》2023年第12期264-273,共10页Infrared and Laser Engineering

摘　　要：稀土掺杂可以有效地改变基体材料的结构并提高使用性能。利用磁控溅射法在单晶硅和多晶CVD金刚石上分别制备了未掺杂及La掺杂的Y_(2)O_(3)薄膜,研究了La掺杂氧化钇(Y_(2)O_(3))增透薄膜的组成、结构及性能。X射线光电子能谱(XPS)和掠入射X射线(GIXRD)研究表明,金属La与O相互作用,以La-O化合物形式存在于Y_(2)O_(3)薄膜中,未掺杂的Y_(2)O_(3)薄膜呈现立方(222)面柱状晶体取向,随着La掺杂功率的增加,开始出现新的单斜Y_(2)O_(3)相(111)晶面。从扫描电镜(SEM)观察到不同La掺杂功率下Y_(2)O_(3)薄膜呈现柱状晶结构,结晶质量较好。由原子力显微镜(AFM)证实,与未掺杂的Y_(2)O_(3)薄膜相比,La掺杂的Y_(2)O_(3)薄膜具有较低的粗糙度(RMS)值。在La掺杂的Y_(2)O_(3)薄膜中,随着La浓度的增加,柱状晶的晶粒尺寸显著减小。在8~12μm的长波红外范围内,La掺杂后的Y_(2)O_(3)/金刚石薄膜最大透过率为80.3%,与CVD金刚石相比,透过率提高19.8%。颗粒细小的La掺杂Y_(2)O_(3)薄膜具有较高的硬度和弹性模量,硬度由未掺杂(12.02±0.37)GPa增加到(14.14±0.39)GPa,弹性模量由(187±14)GPa增加到(198±7.5)GPa。结果表明,与未掺杂Y_(2)O_(3)薄膜相比,La掺杂的Y_(2)O_(3)薄膜在保持较高红外透过率条件下,通过细晶强化获得了更高的硬度,有利于提升砂蚀、雨蚀等冲刷性能。Objective With its extremely high thermal conductivity,hardness and excellent infrared transmission properties,diamond is the most ideal material for infrared windows under extreme conditions.However,since the theoretical infrared transmittance of diamond is only 71%,further development of diamond surface anti-reflection coating has become a key step in the improvement of diamond infrared window.Compared with the traditional infrared anti-reflection coating,Y_(2)O_(3)has lower refractive index,wider anti-reflection band and stable optical properties,which is an ideal diamond infrared anti-reflection coating,but poor mechanical properties make it difficult to prevent external damage in extreme environments.In the current study,the mechanical properties can be changed by changing the phase structure of the anti-reflection membrane itself,but it is difficult to improve the mechanical properties by changing the growth parameters for phase regulation.Rare-earth doping can effectively change the structure of the matrix material and improve its performance.Methods The Y_(2)O_(3)film deposited by the magnetron sputtering method has strong adhesion and high purity of the membrane layer.Moreover,the oxygen-argon ratio can be controlled in the process of preparing the oxide film,which is more conducive to obtaining the oxide film close to the stoichiometric ratio.Therefore,undoped and La-doped Y_(2)O_(3)films were prepared on mono-crystalline silicon and poly-crystalline CVD diamond by magnetron sputtering method.During the RF reaction sputtering,the target atoms of Ar plasma react with the reaction gas O2,and the Y_(2)O_(3)film is deposited on the substrate surface.By adjusting the RF sputtering power of the doped element La target,the doping content of La element is adjusted.Results and Discussions The composition,structure and properties of La-doped Y_(2)O_(3)anti-reflection films were studied.X-ray photoelectron spectroscopy(XPS)and graze-incidence X-ray(GIXRD)studies show that metal La interacts with O and exists in Y_

关 键 词：CVD金刚石 Y_(2)O_(3)增透膜 LA掺杂 透过率 

分 类 号：TB43[一般工业技术]