一种激光玻璃测厚仪校准装置的研制  

Development of a calibration device for laser glass thickness gauge

作　　者：谢清俊 黄梓效 易增强 袁劲 王玮 XIE Qingjun;HUANG Zixiao;YI Zengqiang;YUAN Jin;WANG Wei(Zhuzhou Metrological Testing and Verification Institute,Zhuzhou 412007,China)

机构地区：[1]株洲市计量测试检定所,湖南株洲412007

出　　处：《工业计量》2023年第5期30-33,37,共5页Industrial Metrology

基　　金：湖南省市场监督管理局科技计划项目(2020KJJH44)。

摘　　要：文章基于激光玻璃测厚仪的工作原理,通过设计标准玻璃和中空腔厚度标准块在校准平台进行自由组合,以不同厚度的单层、两玻一腔甚至三玻两腔标准玻璃组合对激光玻璃测厚仪进行校准。装置确保了光路的稳定和通畅、数值的精确和组装的便捷,并通过测量和分析,证明了其有非常出色的准确性和实用性,能满足各类激光测厚仪的溯源需求。In this paper,based on the working principle of the laser glass thickness gauge,the standard glass and hollow cavity thickness standard blocks are designed to be freely combined on the calibration platform.As so,single-layer,two-glass-one-cavity,or even three-glass-two-cavity standard glasses of different thicknesses can be combined and calibrated for laser glass thickness gauges.The device ensures the stability and smoothness of the optical path,the accuracy of the numerical value and the convenience of assembly,and through measurement and analysis,it has been proved that it has excellent accuracy and practicability,and can meet the traceability requirements of various laser thickness gauges.

关 键 词：激光玻璃测厚仪 平板玻璃 标准玻璃 中空厚度标准块 校准装置 

分 类 号：TH821.1[机械工程—仪器科学与技术]