工艺误差下MEMS惯性触发开关的阈值特性研究  

Process Error Threshold Characteristics of MEMSInertial Trigger Switch

作　　者：易振汇 曹云[1] 聂伟荣[1] 席占稳[1] YI Zhenhui;CAO Yun;NIE Weirong;XI Zhanwen(School of Mechanical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China)

机构地区：[1]南京理工大学机械工程学院,江苏南京210094

出　　处：《探测与控制学报》2023年第6期44-49,共6页Journal of Detection & Control

摘　　要：为促进MEMS惯性触发开关实现工程化应用,对工艺误差下MEMS惯性触发开关的阈值特性进行了研究。加工了相关MEMS万向惯性开关器件并进行加速度阈值测试,从尺寸与弹性模量两方面分析其误差来源与产生机理,测量器件的结构尺寸与弹性模量,构建一个考虑工艺尺寸与弹性模量的仿真模型并进行仿真精度分析。仿真结果表明,工艺尺寸与弹性模量误差对开关的阈值特性有重要影响,所构建的仿真模型能够较好地预测开关性能。In order to promote the engineering application of MEMS inertial trigger switch,the threshold characteristics of MEMS inertial trigger switch under process error were studied.In this paper,the related MEMS universal inertial switching device was machined and the threshold test was carried out.The error source and generation mechanism were analyzed from two aspects of size and elastic modulus,and the structural size and elastic modulus of the device were measured.A simulation model considering process size and elastic modulus was constructed and the simulation accuracy was analyzed.The results showed that the process size and elastic modulus errors had important effects on the threshold characteristics of the switch,and the simulation model could predict the switch performance well.

关 键 词：尺寸误差 弹性模量 万向惯性触发开关 阈值测试 

分 类 号：TJ43[兵器科学与技术—火炮、自动武器与弹药工程]