光谱共焦显微镜用超大量程线性色散物镜设计  

Design of a large range linear dispersive objective for chromatic confocal microscopy

作　　者：周向东 陈宇 黄贤文 朱金龙 袁训禹 聂磊[1,2] 董正琼 ZHOU Xiangdong;CHEN Yu;HUANG Xianwen;ZHU Jinlong;YUAN Xunyu;NIE Lei;DONG Zhengqiong(School of Mechanical Engineering,Hubei University of Technology,Wuhan 430068,China;Hubei Key Laboratory of Modern Manufacturing Quality Engineering,Wuhan 430068,China;School of Mechanical Science&Engineering,Huazhong University of Science and Technology,Wuhan 430074,China)

机构地区：[1]湖北工业大学机械工程学院,湖北武汉430068 [2]现代制造质量工程湖北省重点实验室,湖北武汉430068 [3]华中科技大学机械科学与工程学院,湖北武汉430074

出　　处：《光学技术》2023年第6期659-663,共5页Optical Technique

基　　金：湖北工业大学大学生创新创业训练计划项目(202210500006)。

摘　　要：现有的光谱共焦显微镜色散物镜的量程大多在数毫米量级,为满足工业测量领域对大量程线性色散物镜的需求,文章从线性色散物镜设计原理出发,采用高性价比环境友好型光学玻璃,设计了一款仅由五片全球面镜片组成的超大量程线性色散物镜。设计结果表明,该物镜在400~700nm波长范围内的轴向色散达到30.44mm,且色散-波长线性度高于0.99,具有优异的线性关系,理论分辨率可以达到2.034μm。The measuring range of most existing dispersive objective lenses for the chromatic confocal microscopy are on the order of several millimeters.In order to meet the demand for large range linear dispersive objective in the industrial measurement field,a linear dispersive objective with a super large range was designed based on the design principle of linear dispersive objective.It is composed of only five spherical lenses,all of which are made of cost-effective and environmentally friendly optical glasses.The design results show that the axial dispersion of the objective lens is 30.44mm in the wavelength range of 400~700nm,and the dispersion-wavelength linearity is higher than 0.99,which has an excellent linear relationship,and the theoretical resolution can reach 2.034μm.

关 键 词：光学设计 色散物镜 线性色散 光谱共焦 ZEMAX 

分 类 号：O439[机械工程—光学工程]