添加Mo对AlTiN涂层组织结构和力学性能的影响  

Effect of Mo Addition on Microstructure and Mechanical Properties of AlTiN Coating

作　　者：殷俊 应普友 孙含影 张平[2,3] 朱智航 Vladimir Levchenko 吴建波[2,3] 黄敏 林长红 杨涛 Yin Jun;Ying Puyou;Sun Hanying;Zhang Ping;Zhu Zhihang;Vladimir Levchenko;Wu Jianbo;Huang Min;Lin Changhong;Yang Tao(College of Biological and Chemical Engineering,Zhejiang University of Science and Technology,Hangzhou 310000,China;School of Materials Science and Engineering,Taizhou University,Taizhou,Zhejiang 318000,China;不详)

机构地区：[1]浙江科技学院生物与化学工程学院 [2]台州学院浙江省工量刃具检测与深加工技术研究重点实验室 [3]台州学院材料科学与工程学院

出　　处：《工具技术》2023年第11期30-34,共5页Tool Engineering

基　　金：浙江省自然科学基金重点项目(LTZ20E020001);台州市科技计划项目(22gya09)。

摘　　要：采用阴极电弧离子镀技术在硬质合金基体上分别沉积AlTiN和AlTiMoN两种涂层。采用扫描电镜、能谱仪、X射线衍射仪表征两种涂层的微观组织,并通过纳米压痕仪和摩擦磨损试验机测试分析涂层的硬度、弹性模量及摩擦磨损性能。结果表明,阴极多弧离子镀制备的两种涂层表面都有液滴的缺陷,且呈柱状生长;添加Mo元素后AlTiMoN涂层向(111)面的择优取向更加明显;AlTiMoN涂层比AlTiN涂层具有更加优异的力学性能,Mo的添加使涂层硬度从27.98GPa提高到30.27GPa,弹性模量从284.42GPa提高到368.33GPa,摩擦系数从0.85降到0.6,且涂层的耐磨性也得到提升。Two kinds of coatings,AlTiN and AlTiMoN,are deposited on the cemented carbide substrate by cathodic arc ion plating technology.Scanning electron microscope,energy dispersive spectrometer and X-ray diffractometer are used to characterize the microstructure of the two coatings.And the hardness,elastic modulus and friction and wear properties of the coatings are analyzed by nano-indentation and friction and wear testing machine.The results show that both the two coatings have droplet on the surface and grew in columns.After the addition of Mo element,the preferred(111)orientation of the coating is more obvious.Besides,the hardness and the elastic modulus of the coating with Mo addition increase from 27.98GPa and 284.42GPa to 30.27GPa and 368.33GPa,respectively.And the friction coefficient of the AlTiMoN coating decreases compared with that of the AlTiN coating,meanwhile the wear resistance of the AlTiMoN coating is better than that of the AlTiN coating.

关 键 词：阴极电弧离子镀 AlTiN涂层 AlTiMoN涂层 微观组织 硬度 弹性模量 摩擦磨损 

分 类 号：TG115[金属学及工艺—物理冶金] TH161[金属学及工艺—金属学]