基于碲化铋纳米线的长波红外光热电探测器  

Long-Wave Infrared Photothermoelectric Detector Based on Bi_(2)Te_(3)Nanowires

作　　者：曹晓鹏 贾文博 陆晓伟 姜鹏[1] Cao Xiaopeng;Jia Wenbo;Lu Xiaowei;Jiang Peng(State Key Laboratory of Catalysis,CAS Center for Excellence in Nanoscience,Dalian Institute of Chemical Physics,Chinese Academy of Sciences,Dalian 116023,China;University of Chinese Academy of Sciences,Bejing100049,China)

机构地区：[1]中国科学院、大连化学物理研究所、催化基础国家重点实验室中国科学院纳米科学卓越中心,辽宁大连116023 [2]中国科学院大学,北京100049

出　　处：《半导体技术》2023年第12期1084-1091,共8页Semiconductor Technology

基　　金：国家自然科学基金资助项目(62105332);辽宁省自然科学基金资助项目(2023010613-JH3/107);大连化学物理研究所创新研究基金资助项目(DICP I202037)。

摘　　要：研究碲化铋(Bi_(2)Te_(3))光电探测器在长波红外波段的响应机制及性能提升策略对光电探测的发展具有重要意义。首先通过化学气相沉积(CVD)中生长温区的选择,实现了热力学主导的纳米结构形貌可控合成,其形状从三角形纳米片转变为纳米线。然后研究了Bi_(2)Te_(3)纳米线光电探测器在长波红外波段的响应,确定其响应机制由光热电效应主导。通过优化电极材料,将探测器响应度提升至17 V/W,噪声等效功率为0.22 nW·Hz^(-1/2);通过构造非对称电极结构,解决了微纳型光热电探测器在全局光照明下无响应电压输出的问题。此外,Bi_(2)Te_(3)纳米线光热电探测器响应时间为53μs,突破了传统热型光电探测器毫秒级响应速度的限制。与其他复杂的结构设计相比,Bi_(2)Te_(3)纳米线光电探测器有与之相当的性能,为二维材料光热电探测器的设计提供了新的思路。It is of great significance to study the response mechanism and performance improvement strategy of bismuth telluride(Bi_(2)Te_(3))photoelectric detector in long-wave infrared band.Firstly,through selection of the growth temperature zone during chemical vapor deposition(CVD),the thermodynamicallyled morphology controlled synthesis of nanostructures was achieved,and the shape was changed from triangular nanosheets to nanowires.It is revealed that the long-wave infrared photoresponse of Bi_(2)Te_(3)nanowire photoelectric detector is dominated by the photothermoelectric effect.Through the optimization of electrode material,the responsivity of the detector is improved to 17 V/W,and the noise equivalent power is 0.22 nW·Hz^(-1/2),The asymmetic electrode structure was constructed to solve the problem that the micro-nano photothermoelectric detector has no response voltage output under global light illumination.In addition,the Bi,Te,nanowire photothermoelectric detector exhibits a short response time of 53μs,breaking the limit of millisecond response speed of traditional thermal photoelectric detectors.Compared with other complex structural designs,the Bi_(2)Te_(3)nanowire photoelectric detector has comparable performances,which provides a new idea for the design of two-dimensional photothermoelectric detectors.

关 键 词：碲化铋(Bi2Te3) 纳米线 长波红外探测 光热电效应 形貌控制 

分 类 号：TN36[电子电信—物理电子学]