基于SMIC 180nm工艺的内插延时链型TDC芯片  

Interpolated Delay Chain TDC Chip Based on SMIC 180 nm Process

作　　者：汪炯 马毅超[1] 蒋俊国 庄建 滕海云[2] Wang Jiong;Ma Yichao;Jiang Junguo;Zhuang Jian;Teng Haiyun(School of Electrical and Control Engineering,Shaanxi University of Science and Technology,Xi'an 7i0021,China;Spallation Neutron Source Science Center,Dongguan 523803,China;Institute of High Energy Physics,Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]陕西科技大学电气与控制工程学院,西安710021 [2]散裂中子源科学中心,广东东莞523803 [3]中国科学院高能物理研究所,北京100049

出　　处：《半导体技术》2023年第12期1108-1114,共7页Semiconductor Technology

基　　金：国家自然科学基金资助项目(11975255)。

摘　　要：在高能同步辐射光源的高分辨谱学线站系统(HEPS-B5)的核共振散射实验中,为满足测试样品对时间数字转换皮秒级的高分辨率时间测量要求,基于SMIC 180 nm工艺设计了一款内插延时链型的四通道时间数字转换器(TDC)芯片。该TDC芯片采用“粗计数”和“细计数”相结合的链状结构,通过内插延时链法来提高测量分辨率,并结合时钟计数器以实现较大的动态测量范围。为了阻止亚稳态的传递,使用两级反相器作为基本延时单元,另外通过异步先进先出(FIFO)缓冲器实现数据在不同时钟域之间的安全传递。实验测试结果表明,该TDC芯片的时间分辨率可达到56.3 ps,动态测量范围为0~262μs,能够满足核共振散射实验的高精度时间测量要求。In the context of the nuclear resonance scattering experiment within the high-resolution spectroscopy line station system(HEPS-B5)of the high energy photon source,in order to meet the time measurement demands of high-resolution time-to-digital conversion at the picosecond level for test sam-ples,a four-channel interpolated delay chain time-to-digital converter(TDC)chip based on SMIC 180 nm process was developed.The TDC chip utilized an interpolated delay chain method with a chain structure that combining both"coarse counting"and"fine counting"to improve measurement resolution,and combined with a clock counter to achieve a wider dynamic measurement range.In order to prevent the transmission of metastable states,a two-stage inverter was employed as the basic delay unit,and the data was safely transferred between different clock domains though an asynchronous first-in-first-out(FIFO)buffer.Experimental test results demonstrate that the TDC chip offers a time resolution of 56.3 ps and a dynamic measurement range spanning from O0 to 262μs,effectively meeting the high-precision time mea-surement requirements for nuclear resonance scattering experiments.

关 键 词：高能同步辐射光源(HEPS) 内插延时链 时间数字转换器(TDC) 高分辨率 180nm工艺 

分 类 号：TN791[电子电信—电路与系统] TN432