薄膜热电阻热流传感器的对比标定结果及分析  

Calibration results and analysis of thin-film gauges calibrated with the transfer method

作　　者：杨凯[1] 刘济春[1] 陈苏宇[1] 朱新新[1] 王辉[1] YANG Kai;LIU Jichun;CHEN Suyu;ZHU Xinxin;WANG Hui(Hypervelocity Aerodynamics Institute,China Aerodynamics Research and Development Center,Mianyang 621000,China)

机构地区：[1]中国空气动力研究与发展中心超高速空气动力研究所,绵阳621000

出　　处：《实验流体力学》2023年第6期106-111,共6页Journal of Experiments in Fluid Mechanics

基　　金：国家重点研发计划项目(2019YFA0405300);国家自然科学基金项目(11902330)。

摘　　要：常用于薄膜热电阻热流传感器(简称薄膜热流计)的两步法存在标定步骤多、误差源多等问题。在解决吸收薄膜必要性、标定时限和标定热流范围等问题的基础上,实现了薄膜热流计的对比标定。在对比标定薄膜热流计时,基体材料的热物性参数乘积及热电阻的电阻–温度系数被处理为简单的传感器灵敏度系数,使得标定实验仅需重复简单的步骤,有效减少了误差源;针对通过对比标定获得的多支薄膜热流计灵敏度系数差异大的问题,在分析其测温原理的基础上,通过去除热电阻的电阻–温度系数,得到同一批次生产的多支薄膜热流计较为一致的修正灵敏度系数。薄膜热流计对比标定结果的扩展不确定度不超过6.5%,明显优于两步法标定结果的扩展不确定度(约10.7%),提升了薄膜热流计测热结果的可信度。Considering the fact that there are more error sources in the measured heat flux with thin-film gauges when the two-stage approach is applied to determine the thermal product and resistance–temperature factor,the transfer method is applied to directly calibrate thin-film gauges,in which the thermal product and resistance-temperature factor are treated as the sensitivity coefficients.To get the consistent calibration results of different thin-film gauges fabricated in a batch,the sensitivity coefficients are divided by the resistance–temperature factors of the thin-film gauges,and then the correction sensitivity coefficients are consistent.With the transfer calibration technique,the calibration results of thin-film gauges show a good linearity with a relative expanded uncertainty below 6.5%,which is lower than that reported in other researches,in which the two-stage approach is used to calibrate thin-film gauges.

关 键 词：薄膜热电阻 热流 标定 灵敏度系数 不确定度分析 激波风洞 

分 类 号：V441[航空宇航科学与技术—飞行器设计]