2.45GHz ECR强流等离子体源核心部件设计与实验研究  

Design and experimental study of core components of a 2.45 GHz ECR high-current plasma source

作　　者：李钢 陈根 段文学 彭标 尉传颂 LI Gang;CHEN Gen;DUAN Wen-Xue;PENG Biao;WEI Chuan-Song(College of Electronic and Information Engineering,Anhui Jianzhu University,Hefei 230601,China;Institute of Plasma Physics,Chinese Academy of Sciences(CAS),Hefei Institutes of Physical Science,Hefei 230031,China;Material Science and Information Technology Research Institute,Anhui University,Hefei 230601,China;Hefei Kerson Ion Medical Technology Equipment Co.,Ltd,Hefei 230088,China)

机构地区：[1]安徽建筑大学电子与信息工程学院,合肥230601 [2]中国科学院合肥物质研究院等离子体物理研究所,合肥230031 [3]安徽大学物质科学与信息技术研究院,合肥230601 [4]合肥中科离子医学技术装备有限公司,合肥230088

出　　处：《原子与分子物理学报》2024年第5期94-100,共7页Journal of Atomic and Molecular Physics

基　　金：国家重点研发计划(E05KCI25591)。

摘　　要：电子回旋共振(Electron Cyclotron Resonance,ECR)等离子体源能产生高电荷态离子、高流强的单电荷态离子,提供稳定的束流和良好的重复性.核心部件的设计对ECR等离子体源是至关重要的,磁场对等离子体的生成和分布有直接影响,良好的磁场可以提高等离子体的性能和效率.采用有限元分析方法对ECR等离子体源磁场进行分析与设计,得到了满足设计需求与目标的磁场位形,通过高斯计对设计的永磁环轴向磁场精确测量,发现磁场仿真结果与实验结果吻合比较好,只是轴向磁场最大值及对应位置上有点偏差.通过集成实验,研究核心部件对离子源引出束流强度的影响,引出束流稳定且强度达到7 mA.Electron Cyclotron Resonance(ECR)plasma sources can produce highly charged ions and high-current single-charged ions,providing stable beam and good repeatability.The design of the core components is crucial to the ECR plasma source,as the magnetic field has a direct impact on the generation and distribution of the plasma.Finite element analysis was used to analyze and design the magnetic field of the ECR plasma source,and a magnetic field configuration that meets the design requirements and targets was obtained.The axial magnetic field of the designed permanent magnet was accurately measured using a Gaussmeter,and the simulation results were found to be in good agreement with the experimental results,with only slight deviations in the maximum value and corresponding position of the axial magnetic field.Through integrated experiments,the effect of the core components on the beam current extracted from the ion source was studied,and a stable beam current with an intensity of up to 7mA was achieved.

关 键 词：ECR等离子体源 磁场设计 引出束流 

分 类 号：O65[理学—分析化学]