Varifocal MEMS mirrors for high-speed axial focus scanning:a review  

作　　者：Jaka Pribošek Markus Bainschab Takashi Sasaki 

机构地区：[1]Silicon Austria Labs,Villach,Austria

出　　处：《Microsystems & Nanoengineering》2023年第5期57-71,共15页微系统与纳米工程（英文）

基　　金：performed within the COMET Centre ASSIC Austrian Smart Systems Integration Research Center,which is funded by BMK,BMDW,and the Austrian provinces of Carinthia and Styria,the framework of COMET—Competence Centres for Excellent Technologies.The COMET program is run by FFGÖsterreichische Forschungsförderungsgesellschaft mbH.

摘　　要：Recent advances brought the performance of MEMS-based varifocal mirrors to levels comparable to conventional ultra-high-speed focusing devices.Varifocal mirrors are becoming capable of high axial resolution exceeding 300 resolvable planes,can achieve microsecond response times,continuous operation above several hundred kHz,and can be designed to combine focusing with lateral steering in a single-chip device.This survey summarizes the past 50 years of scientific progress in varifocal MEMS mirrors,providing the most comprehensive study in this field to date.We introduce a novel figure of merit for varifocal mirrors on the basis of which we evaluate and compare nearly all reported devices from the literature.At the forefront of this review is the analysis of the advantages and shortcomings of various actuation technologies,as well as a systematic study of methods reported to enhance the focusing performance in terms of speed,resolution,and shape fidelity.We believe this analysis will fuel the future technological development of next-generation varifocal mirrors reaching the axial resolution of 1000 resolvable planes.

关 键 词：AXIAL mirrors EXCEEDING 

分 类 号：TP2[自动化与计算机技术—检测技术与自动化装置]