Temperature,pressure,and humidity SAW sensor based on coplanar integrated LGS  

作　　者：Xiaorui Liang Lei Zhang Qiulin Tan Wenhua Cheng Dan Hu Shuang Li Lin Jing Jijun Xiong 

机构地区：[1]State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China [2]Key Laboratory of Micro/nano Devices and Systems,Ministry of Education,North University of China,Tai Yuan 030051,China [3]School of Materials Science and Engineering,Nanyang Technological University,50 Nanyang Avenue,Singapore 639798,Singapore

出　　处：《Microsystems & Nanoengineering》2023年第5期87-99,共13页微系统与纳米工程（英文）

基　　金：supported by the National Natural Science Foundation of China(No.U1837209);Key Research and Development Plan of Shanxi Province under Grant(202102030201005);the Outstanding Young Talents Support Plan of Shanxi Province,the Young Sanjin Scholar Distinguished Professor Plan of Shanxi Province,the Innovative Research Group Project of National Natural Science Foundation of China(No.51821003);the Shanxi“1331 project”key subjects Construction,and in part by National Key R&D Program of China(No.2018YFB2002503).

摘　　要：This paper presents a surface acoustic wave(SAW)sensor based on coplanar integrated Langasite(LGS)that is fabricated using wet etching,high-temperature bonding,and ion beam etching(IBE)processes.The miniaturized multiparameter temperature‒pressure-humidity(TPH)sensor used the MXene@MoS2@Go(MMG)composite to widen the humidity detection range and improve the humidity sensitivity,including a fast response time(3.18 s)and recovery time(0.94 s).The TPH sensor was shown to operate steadily between 25–700°C,0–700 kPa,and 10–98%RH.Coupling issues among multiple parameters in complex environments were addressed by decoupling theΔf-temperature coupling factor to improve the accuracy.Therefore,this work can be applied to simultaneous measurements of several environmental parameters in challenging conditions.

关 键 词：LGS humidity SENSOR 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]