Highly sensitive flexible heat flux sensor based on a microhole array for ultralow to high temperatures  

作　　者：Le Li Bian Tian Zhongkai Zhang Meng Shi Jiangjiang Liu Zhaojun Liu Jiaming Lei Shuimin Li Qijing Lin Libo Zhao Zhuangde Jiang 

机构地区：[1]School of Mechanical Engineering,Xi’an Jiaotong University,710049 Xi’an,China [2]State Key Laboratory for Manufacturing Systems Engineering,International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies,Xi’an Jiaotong University(Yantai)Research Institute for Intelligent Sensing Technology and System,Xi’an Jiaotong University,Xi’an 710049,China [3]Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing,Yantai 265503,China

出　　处：《Microsystems & Nanoengineering》2023年第5期345-356,共12页微系统与纳米工程（英文）

基　　金：supported by The National Key Research and Development Program of China(2022YFB3206400);the Fundamental Research Funds for the Central Universities(No.xhj032021016-06);the National Science and Technology Major Project(Grant No.J2022-V-0003-0029);the Open Research Fund of SKLMS(Grant No.sklms2021009).

摘　　要：With the growing demand for thermal management of electronic devices,cooling of high-precision instruments,and biological cryopreservation,heat flux measurement of complex surfaces and at ultralow temperatures has become highly imperative.However,current heat flux sensors(HFSs)are commonly used in high-temperature scenarios and have problems when applied in low-temperature conditions,such as low sensitivity and embrittlement.In this study,we developed a flexible and highly sensitive HFS that can operate at ultralow to high temperatures,ranging from−196°C to 273°C.The sensitivities of HFSs with thicknesses of 0.2 mm and 0.3 mm,which are efficiently manufactured by the screen-printing method,reach 11.21μV/(W/m2)and 13.43μV/(W/m2),respectively.The experimental results show that there is a less than 3%resistance change from bending to stretching.Additionally,the HFS can measure heat flux in both exothermic and absorptive cases and can measure heat flux up to 25 kW/m2.Additionally,we demonstrate the application of the HFS to the measurement of minuscule heat flux,such as heat dissipation of human skin and cold water.This technology is expected to be used in heat flux measurements at ultralow temperatures or on complex surfaces,which has great importance in the superconductor and cryobiology field.

关 键 词：HIGH STRETCHING SUPERCONDUCTOR 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]