双辉等离子渗铬界面层对类石墨碳基涂层力学及磨蚀性能的影响  

Effect of Double Glow Plasma Surface Alloying Cr Buffer Layer on Mechanical and Tribocorrosion Properties of Graphite-like Carbon Composite Coating

作　　者：闫江山 郭鹏 林乃明[1] 张应鹏 马冠水 周小卉 汪汝佳 严凯 李小凯 汪爱英[2,3] YAN Jiangshan;GUO Peng;LIN Naiming;ZHANG Yingpeng;MA Guanshui;ZHOU Xiaohui;WANG Rujia;YAN Kai;LI Xiaokai;WANG Aiying(College of Material Science and Engineering,Taiyuan University of Technology,Taiyuan 030024,China;Key Laboratory of Marine Materials and Related Technologies,Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,Zhejiang Ningbo 315201,China;Zhejiang Key Laboratory of Marine Materials and Protective Technologies,Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,Zhejiang Ningbo 315201,China)

机构地区：[1]太原理工大学材料科学与工程学院,太原030024 [2]中国科学院宁波材料技术与工程研究所中国科学院海洋新材料与应用技术重点实验室,浙江宁波315201 [3]中国科学院宁波材料技术与工程研究所浙江省海洋材料与防护技术重点实验室,浙江宁波315201

出　　处：《表面技术》2024年第1期169-181,共13页Surface Technology

基　　金：山西省科技合作交流专项项目(202204041101021);山西省回国留学人员科研资助项目(2020-035);中科院海洋新材料与应用技术重点实验室/浙江省海洋材料与防护技术重点实验室开放课题(2021K03)。

摘　　要：目的 研究渗铬界面层对铬/类石墨碳(Cr/Graphite-Like Carbon,GLC)复合涂层力学性能、结合强度及磨蚀行为的影响,阐明Cr/GLC复合涂层的抗磨蚀机理。方法 以316L不锈钢(316L)为基体,先借助双辉等离子表面合金化(DGPSA)技术制备渗铬界面层,再采用直流磁控溅射(DCMS)技术制备顶层GLC涂层。利用扫描电子显微镜(SEM)、共聚焦显微拉曼光谱仪(Raman)和X射线衍射仪(XRD)表征涂层的微结构与成分,采用纳米压痕仪、划痕仪、摩擦磨损仪和电化学工作站测试复合涂层的力学性能、断裂韧性、结合强度和抗磨蚀性能。结果 渗铬界面层能够促进GLC涂层的石墨化转变,实现硬度分布的梯度变化(基体为3.65 GPa,渗铬界面层为8.97 GPa,表面为13.15 GPa),有效阻碍了裂纹的扩展。与GLC涂层相比,Cr/GLC复合涂层具有较高的断裂韧性和结合强度(≥50 N),在3.5%NaCl溶液中具有更低的摩擦系数(0.055)和更低的磨损率(3.22×10^(-7)mm^(3)/Nm),其抗腐蚀性和化学稳定性也明显更优。结论 通过界面设计,实现了Cr/GLC复合涂层硬度分布的梯度过渡,提高了复合涂层的断裂韧性以及与316L的结合强度,赋予了复合涂层优异的抗磨蚀性能,为其在海洋苛刻环境下的磨蚀防护提供了有益借鉴。Due to its excellent chemical stability and high wear and corrosion resistance,graphite-like carbon(GLC)coating is considered as a promising tribocorrosion protective technology for metallic components under harsh marine environment.However,the inadequate adhesion strength can lead to the deposited GLC flaking or peeling off from the substrate.Because of the large mechanical and chemical mismatch between the GLC coating and the metallic substrates,such as 316L stainless steel,which may result in coating failure,especially under heavy bearing loading.Interfacial engineering is one effective strategy to solve the above-mentioned problems for GLC coating.Compared with other common physical vapor deposition methods,double glow plasma surface alloying(DGPSA)technology shows much more advantages for the preparation of buffer layer or interface layer,because its higher incident ion density benefits the formation of adhesive metallurgical layer to improve interfacial adhesion.Although much effort has been devoted to the effect of DGPSA process on the mechanical and tribological behavior of some surface modification layers,little is known about the role of Cr buffer layer prepared by DGPSA on the interfacial adhesion and tribocorrosion behavior of GLC coating.In this work,Cr interface layer was selected and introduced onto 316L substrate by DGPSA process,where the subsequent GLC coating as top layer was deposited by DC magnetron sputtering(DCMS)system.The microstructure,mechanical properties,interfacial adhesion and tribocorrosion behavior of GLC coating on the DGPSA-Cr layer were investigated.Scanning electron microscopy(SEM),confocal microscopic Raman spectrometer(Raman)and X-ray diffractometer(XRD)were used to characterize the microstructure,chemical composition and surface morphology of the coating.Scratch testing system,nano-indenter and ball on disc reciprocating friction were employed to test the interfacial adhesion strength and the mechanical and tribocorrosion properties of GLC coating,respectively.The results s

关 键 词：双辉等离子表面合金化 直流磁控溅射 类石墨碳 渗铬界面层 结合强度 磨蚀 

分 类 号：TG174[金属学及工艺—金属表面处理]