聚焦超声作用下SnO_(2)气体传感器响应特性研究  

Study on the Response Characteristics of SnO_(2)Gas Sensor under Focused Ultrasound Excitation

作　　者：王洋 苏松飞 徐浩然 杨柳 李胜 WANG Yang;SU Songfei;XU Haoran;YANG liu;LI Sheng(School of Mechanical Engineering,Nanjing Institute of Technology,Nanjing 211167,China;Industrial Center/School of Innovation and Entrepreneurship,Nanjing Institute of Technology,Nanjing 211167,China)

机构地区：[1]南京工程学院机械工程学院,江苏南京211167 [2]南京工程学院工业中心/创新创业学院,江苏南京211167

出　　处：《南京工程学院学报（自然科学版）》2023年第3期54-59,共6页Journal of Nanjing Institute of Technology(Natural Science Edition)

基　　金：国家自然科学基金青年科学基金项目(52005248);江苏省自然科学基金青年基金项目(BK20201038);南京工程学院高层次人才引进基金项目(YKJ201949)。

摘　　要：针对金属氧化物半导体气体传感器相对于电化学、光学等气体传感器灵敏度较低的问题,提出利用聚焦超声波驱动金属氧化物半导体气体传感器敏感层附近的目标气体分子与敏感材料接触,促进目标气体与敏感材料之间的氧化还原反应,从而提高气体传感器的灵敏度.试验表明,聚焦超声波能大幅提高氧化物半导体气体传感器的灵敏度,在一定强度的聚焦超声波作用下,SnO_(2)气体传感器的灵敏度最大可提高4倍.Metal oxide semiconductor(MOS)gas sensors possess advantages such as fast response,good durability,and cost-effectiveness,making them the most widely utilized gas sensors currently.However,compared to electrochemical,optical,and other types of gas sensors,their sensitivity is relatively low.In this paper,focused ultrasound is employed to drive the target gas molecules near the sensor's sensitive layer into contact with the sensitive material,thereby promoting the REDOX reaction between the target gas and the sensitive material,which in turn enhances the sensitivity of the MOS gas sensor.Experimental results demonstrate that focused ultrasound can significantly enhance the sensitivity of the MOS gas sensor,with the sensitivity of the SnO,gas sensor being potentilly increased by up to 4 times.

关 键 词：气体传感器 灵敏度 聚焦超声波 

分 类 号：TP212.9[自动化与计算机技术—检测技术与自动化装置]