Parylene F在V频段MMIC防护上的应用  

Investigation for Protective Parylene F Applied in V-band MMIC Circuits

作　　者：仝晓刚[1] TONG Xiaogang(The 10th Research Institute of CETC,Chengdu 610036,China)

机构地区：[1]中国电子科技集团公司第十研究所,成都610036

出　　处：《电子工艺技术》2024年第1期18-21,共4页Electronics Process Technology

基　　金：2021年度四川省重要技术标准研究项目(ZYBZ2021-21)。

摘　　要：为了验证Parylene F材料在V频段MMIC防护上的应用,设计了薄膜滤波器、铝基和铜基的可调放大器模块。采用真空气相沉积工艺在滤波器、放大器模块上制作Parylene F膜层。测试结果表明:5μm的膜层使滤波器中心频率向左偏移300~350 MHz,其插损、矩形系数几乎没有变化;5μm膜层使可调放大器模块增益峰值下降约0.1%~0.2%,正常态、衰减态下的增益均出现了漂移现象,但处理前后的增益曲线趋势基本一致;模块的噪声系数峰值增加了1.12~1.78 dB,正常态与衰减态下的噪声系数曲线均出现了漂移,但处理前后的噪声系数曲线趋势基本一致,且铜基腔体的噪声系数恶化较铝基腔体弱。分析结果表明,通过滤波器、可调放大器的补偿设计,可以实现Parylene F在V频段MMIC防护上的应用。In order to verify the feasibility of protective Parylene F deposited on MMICs,thin film filter,aluminum base and copper base tunable amplifier modules are designed.The Parylene F is deposited by vacuum vapor depositon method both on the filter and amplifiers.The test results show that the center frequency of the fi lter shifts 300~350 MHz towards to low frequency by deposited 5μm Parylene F fi lm,but its insertion loss and rectangles are almost no changes.The 5μm fi lm causes the gain peak of the adjustable amplifi er to decrease about 0.1%~0.2%,and the gain in the normal or attenuation shows a drift phenomenon,but the trend of the gain curves before and after the treatment is basically the same.The noise peak of the module increased by 1.12~1.78 dB,and the noise curves in both normal or attenuation is drifted,but the trend of the noise curves before and after the treatment is almost no changes,and the copper based module is better than aluminum based for the deterioration of the noise fi gure.The analysis show that the targets predesign of fi lter and adjustable amplifi er enables the protective application of Parylene F on V band MMICs.

关 键 词：Parylene F 防护 滤波器 可调放大器 

分 类 号：TN605[电子电信—电路与系统]