一种分时复用的绝对式纳米时栅位移传感器设计  

Design of absolute nanometer time grating displacement sensor with time division multiplexing

作　　者：邓志钊 蒲红吉[1,2] 于治成 王合文 樊星辰 DENG Zhizhao;PU Hongji;YU Zhicheng;WANG Hewen;FAN Xingchen(Engineering Research Center of Mechanical Testing Technology and Equipment,Ministry of Education,Chongqing University of Technology,Chongqing 400054,China;Chongqing Key Laboratory of Time-Grating Sensing and Advanced Testing Technology,Chongqing 400054,China;School of Instrument Science and Photoelectric Engineering,Hefei University of Technology,Hefei 230009,China)

机构地区：[1]重庆理工大学机械检测技术与装备教育部工程研究中心,重庆400054 [2]时栅传感及先进检测技术重庆市重点实验室,重庆400054 [3]合肥工业大学仪器科学与光电工程学院,合肥230009

出　　处：《重庆理工大学学报（自然科学）》2023年第12期122-129,共8页Journal of Chongqing University of Technology：Natural Science

基　　金：重庆市教委科学技术研究项目(KJQN202101121)。

摘　　要：现代高端装备制造对精密位移检测技术提出了绝对位置测量、高精度和大量程的需求,针对绝对式位移量程与编码的矛盾,提出了一种基于分时复用方法的绝对式纳米时栅位移传感器。采用单列式时栅位移传感器作为绝对式传感器的精测部分,记为传感器A。为了实现绝对位移测量,增加一个周期数比传感器A少且互为质数的对射增量式时栅位移传感器,记为传感器B。利用传感器A与传感器B输出行波的相位值,通过查找表和定位计算实现绝对位移测量。提出了一种分时复用的方法,通过分时间段为传感器A与传感器B提供激励信号,可以有效降低传感器功耗。此外,传感器A与传感器B的感应电极在内部用引线连接,共用1组感应信号处理接口,减少了1组感应信号处理器件,节约了电路空间。采用多层PCB工艺制造了传感样机,搭建了实验平台并对样机性能进行测试。最终实验结果表明:在450 mm范围内,非线性测量误差达到±3μm。Modern high-end equipment manufacturing requires absolute position measurement,high precision and long ranges for precision displacement detection technology.In view of the conflicts between absolute displacement range and encoding,an absolute nanometer time grating displacement sensor based on time division multiplexing is proposed in this paper.The incremental single-row time grating displacement sensor is employed as the precision measuring part of absolute sensor,which is recorded as sensor A.To achieve the absolute displacement measurement,a convergent incremental time-grating displacement sensor with fewer cycles than sensor A and both numbers of cycles as prime numbers,recorded as sensor B,is added.Absolute displacement measurement is achieved by using the phase value of the traveling wave output from sensors A and B to develop look-up table and perform positioning calculation.A method of time division multiplexing is proposed.Applying excitation signals to the excitation electrodes of sensors A and B in different time effectively reduces the power consumption of the sensors.In addition,the induction electrodes of sensors A and B are connected with leads internally and share a group of induction signal processing interfaces,saving not only a group of induction signal processing devices,but also the circuit space.The sensor prototype is manufactured by multi-layer PCB procedure and the experimental platform is built for testing.Experimental results show the nonlinear measurement error reaches±3μm within a range of 450 mm.

关 键 词：分时复用方法 绝对位移测量 纳米时栅 位移传感器 

分 类 号：TH7[机械工程—仪器科学与技术]