研磨盘运动特性对氮化硅陶瓷球成形影响性分析  

Study on the influence of grinding disc motion on the forming of silicon nitride ceramic balls

作　　者：葛自强 李颂华[1,2] 吴玉厚[1,2] 孙健[1] 田军兴 夏忠贤 GE Ziqiang;LI Songhua;WU Yuhou;SUN Jian;TIAN Junxing;XIA Zhongxian(School of Mechanical Engineering,Shenyang Jianzhu University,Shenyang 110168,China;National-Local Joint Engineering Laboratory of NC Machining Equipment and Technology of High-Grade Stone,Shenyang 110168,China)

机构地区：[1]沈阳建筑大学机械工程学院,沈阳110168 [2]沈阳建筑大学,高档石材数控加工装备与技术国家地方联合工程实验室,沈阳110168

出　　处：《金刚石与磨料磨具工程》2023年第6期750-759,共10页Diamond & Abrasives Engineering

摘　　要：为提高氮化硅陶瓷球加工精度,提出研磨盘偏摆运动可控的新型锥形柔性支承研磨方式,探究柔性支承研磨方式下陶瓷球成形机理。基于新型研磨方式建立仿真模型,深入分析研磨盘偏摆运动对于氮化硅陶瓷球研磨轨迹与受力状态影响。在搭建的新型锥形柔性支承研磨平台上进行正交实验,进一步分析研磨盘运动特性对球体成形的影响。仿真与实验结果表明:在柔性支承研磨方式下,随着研磨盘偏摆角增大,球体轨迹均匀性标准差从43.58降至35.49,最大接触力提升至初始值的4倍,陶瓷球平均球直径变动量从1.466μm增至2.382μm,批直径变动量从4.98μm增至10.27μm。研磨盘偏摆运动有利于优化研磨轨迹,但增大了球体受力的不均匀性,不利于改善氮化硅陶瓷球平均球直径变动量与批直径变动量,在实际加工过程中,研磨盘偏摆角需控制在0.02°以内。In order to improve the processing accuracy of silicon nitride ceramic balls and to investigate the mechanism of forming ceramic balls by flexible support grinding method,a new cone-type flexible support grinding method with controlled deflection motion of grinding disc is proposed.Based on the new grinding method,a simulation model is established to deeply analyze the influence of the deflection motion of the grinding disc on the grinding trajectory and force state of the silicon nitride ceramic balls.Orthogonal experiments were conducted on a new cone-type flexible support grinding platform built to further analyze the effect of grinding disc motion characteristics on ball formation.Simulation and experimental results show that under the flexible support grinding method,As the increases of grinding disc deflection angle,the standard deviation of ball trajectory uniformity decreased from 43.58 to 35.49,the maximum contact force increased to 4 times the initial value,the average ball diameter variation increased from 1.466μm to 2.382μm,and the batch diameter variation increased from 4.98μm to 10.27μm.The lower grinding disc deflection motion is beneficial to optimize the grinding trajectory,but increases the unevenness of the ball force,which is not conducive to improving the average ball diameter variation and batch diameter variation of silicon nitride ceramic balls.In the actual process,the angle of deflection of the grinding disc must be controlled to within 0.02°.

关 键 词：氮化硅陶瓷球 柔性支承研磨 研磨盘偏摆 球直径变动量 批直径变动量 

分 类 号：TG58[金属学及工艺—金属切削加工及机床] TG74