MIM波导结构耦合椭圆八字形谐振腔的折射率传感器  

Refractive index sensor with MIM waveguide structure coupled elliptical octagonal resonant cavity

作　　者：单义婷 赵丽娟[1,2,3] 张智娟 黄梓朦[1] SHAN Yiting;ZHAO Lijuan;ZHANG Zhijuan;HUANG Zimeng(School of Electrical and Electronic Engineering,North China Electric Power University,Baoding Heibei 071003,China;Hebei Key Laboratory of Power Internet of Things Technology,North China Electric Power University,Baoding Heibei 071003,China;Baoding Key Laboratory of Optical Fiber Sensing and Optical Communication Technology,North China Electric Power University,Baoding Heibei 071003,China)

机构地区：[1]华北电力大学电气与电子工程学院,河北保定071003 [2]华北电力大学河北省电力物联网技术重点实验室,河北保定071003 [3]华北电力大学保定市光纤传感与光通信技术重点实验室,河北保定071003

出　　处：《光通信技术》2024年第1期34-38,共5页Optical Communication Technology

基　　金：国家自然科学基金项目(62273146、62171185)资助;中央高校基本科研业务费专项资金(2021MS072)资助;河北省自然科学基金项目(E2019502177、E2020502010)资助;河北省省级科技计划(SZX-2020034)资助。

摘　　要：为了进一步提高光学折射率传感器灵敏度,设计了一种金属-介质-金属(MIM)波导结构耦合椭圆八字形谐振腔的折射率传感器。首先,理论分析了该传感结构的原理及关键性能指标;然后,使用有限元分析仿真软件构建了仿真结构,研究其传感性能。仿真结果表明:当a=540 nm、b=340 nm、g=10 nm、l=70 nm时,所设计的传感器的灵敏度可以达到1323 nm/RIU,对应的品质因数可以达到16。In order to improve the sensitivity of optical index sensor,a metal-medium-metal(MIM)waveguide coupled elliptic eight shape cavity is designed.Firstly,the principle and key performance index of the sensor structure are analyzed theoretically.Then,the simulation structure is constructed by using finite element analysis simulation software to study its sensing performance.The simulation results show that when a=540 nm,b=340 nm,g=10 nm,l=70 nm,the sensitivity of the designed sensor can reach 1323 nm/RIU,and the corresponding quality factor can reach 16.

关 键 词：表面等离子体激元 金属-介质-金属波导 折射率传感器 灵敏度 有限元法 

分 类 号：TN253[电子电信—物理电子学] O436[机械工程—光学工程]