压阻式微差压传感器倾角误差分析与研究  

Analysis and research on inclination error of piezoresistive micro differential pressure sensor

作　　者：张龙赐 金忠 曾庆平 Zhang Longci;Jin Zhong;Zeng Qingping(The 48th Research Institute of China Electronics Technology Group Corporation,Changsha 410111,China;The High Performance Intelligent Sensor and Testing System in the Key Laboratory of Hu′nan Province,Changsha 410111,China;The Defense Key Laboratory for thin-Film Sensor Technology in Hunan Province,Changsha 410111,China)

机构地区：[1]中国电子科技集团公司第四十八研究所,长沙410111 [2]高性能智能传感器及检测系统湖南省重点实验室,长沙410111 [3]薄膜传感技术湖南省国防重点实验室,长沙410111

出　　处：《电子测量技术》2023年第17期175-179,共5页Electronic Measurement Technology

摘　　要：针对压阻式微差压传感器在不同姿态位置下倾角误差大的问题,设计了符合灵敏度要求的4种量程的微差压传感器,结果发现,单岛膜结构在硅岛边缘形成了应力集中,双岛膜结构在两岛之间中心位置形成了应力集中,均有助于提高灵敏度。通过单隔离膜片微量充油封装设计减少对倾角误差的影响,结果表明,传感器零点输出与倾角角度近似线性关系。差压量程越小,倾角误差越大。其中,2 kPa时倾角误差不超过0.94%。本研究为微差压传感器设计及其倾角误差分析提供了依据。In order to solve the problem of large inclination error of Piezoresistive micro differential pressure sensor at different attitude positions,this paper designs four range micro differential pressure sensors that meet the sensitivity requirements.The results show that the single island membrane structure forms a stress concentration at the edge of the silicon island,and the double island membrane structure forms a stress concentration at the center between the two islands,both cases help to improve sensitivity.The influence on inclination error is reduced through single isolation diaphragm and micro oil filled package design.The results show that the zero point output of sensor is approximately linearly related to the inclination angle,and the smaller the differential pressure range is,the greater the inclination error is,and the inclination error at 2 kPa shall not exceed 0.94%.This study provides a basis for the design of micro differential pressure sensor and the analysis of its inclination error.

关 键 词：微差压 岛膜设计 仿真分析 倾角误差 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] V441[自动化与计算机技术—控制科学与工程]