凹非球面的非零位干涉检测技术  

A non-null interferometry for concave aspheric surface

作　　者：张旭 李世杰 刘丙才[1] 田爱玲[1] 梁海锋[1] 蔡长龙[1] ZHANG Xu;LI Shi-jie;LIU Bing-cai;TIAN Ai-ling;LIANG Hai-feng;CAI Chang-long(School of Opto-Electronical Engineering,Xi’an Technological University,Xi’an 710021,China)

机构地区：[1]西安工业大学光电工程学院,陕西西安710021

出　　处：《中国光学（中英文）》2024年第1期140-149,共10页Chinese Optics

基　　金：陕西省科技厅资助项目(No.2022GY-222,No.2022GY-262);基础科研(No.JCKY2020426B009);“一带一路”外国专家创新人才交流项目(No.DL2022040006L)。

摘　　要：为了实现凹非球面的快速、高精度与通用化检测,文中提出了一种将非球面当做球面,直接采用干涉仪检测的非零位干涉检测方法,并结合相应的数据处理方法,获得非球面的面形误差检测结果。首先,介绍了该方法的检测原理,建立了回程误差、调整误差的计算与去除模型,研究了面形误差的数据处理方法。然后,以两个不同非球面度的凹非球面为例,对其回程误差和调整误差进行了仿真计算,验证了该方法的有效性。最后,搭建了凹非球面的非零位检测实验装置,成功测量得到其面形误差。通过与自准直零位检测法或LUPHOScan轮廓测量法检测结果对比发现,两种方法测量得到的面形分布和评价指标具有高度一致性,验证了该检测方法的正确性。该检测方法在保证高精度测量的同时兼备一定的通用性与便捷性,为凹非球面的通用化检测提供了一种有效手段。To realize the rapid,high-precision,and universal testing of concave aspheric surface,a non-null interferometry method is proposed in this paper,which takes the asphere as a spherical surface and measures it directly with an interferometer.Combined with the corresponding data processing methods,the test results of the aspheric surface are obtained.Firstly,the detection theory of this method is introduced,the calculation and removal models of retrace error and adjustment error are established,and the data processing method of shape error is studied.Secondly,taking two concave aspherical surfaces with different parameters as an example,the retrace error and adjustment error are simulated,which verified the effectiveness of the method.Finally,a non-null interferometry experimental setup of concave aspheric surface is performed,and its shape error is successfully obtained.By comparing the results with autocollimation method or LUPHOScan method,it is shown that the surface distribution and evaluation indicators of the results are highly consistent,which verifies the correctness of this method.This method provides an effective measurement method for concave aspheric surface with high precision,universality,and convenience.

关 键 词：非球面面形测量 非零位干涉检测 回程误差 数据处理 

分 类 号：TN74[电子电信—电路与系统]