亚纳米孔石墨烯复合薄膜新型标准漏孔制备及其渗氦性能研究  

Preparation and Helium Permeation Properties of New Leak Elements Based on Subnanoporous Graphene Composite Membranes

作　　者：刘招贤 孟冬辉[1] 任国华[1] 张骁 韩琰[1] 刘楚彦 孙立臣[1] 闫荣鑫[1] LIU Zhao-xian;MENG Dong-hui;REN Guo-hua;ZHANG Xiao;HAN Yan;LIU Chu-yan;SUN Li-chen;YAN Rong-xin(Beijing Institute of Spacecraft Environment Engineering,Beijing 100094,China)

机构地区：[1]北京卫星环境工程研究所,北京100094

出　　处：《真空》2024年第1期21-26,共6页Vacuum

基　　金：科工局技术基础科研项目(JSJL2018203B016)。

摘　　要：标准漏孔是氦质谱检漏仪的校准装置,为了提高氦质谱仪检漏灵敏度,必须降低标准漏孔漏率下限。针对目前传统材料加工制作的标准漏孔难以通过改进加工工艺降低漏率下限的情况,利用CVD法制作了一种亚纳米孔石墨烯复合薄膜新型标准漏孔,研究了其渗氦性能和制备工艺稳定性。结果表明:单层石墨烯/PMMA复合薄膜单位面积漏率为4.17×10^(-12)~1.09×10^(-11) Pa·m^(3)/(cm^(2)·s·Pa),通过调节新型材料渗透面积,可制作漏率下限达10-12 Pa·m^(3)/s量级的标准漏孔。The standard leak element is the essential calibration device for the helium mass spectrometry leak detector.To improve the sensitivity of the helium mass spectrometry leak detector,the lower leak limit of the standard leak element should be reduced.In view of the problem that it is difficult to reduce the lower leak limit of the standard leak element made of traditional materials by improving the processing technology.A new type of standard leak element based on subnanoporous graphene composite membranes was prepared using CVD method,and the helium permeation performance and preparation process stability were studied.The results show that the leak rate per unit area of single-layer graphene/PMMA composite membranes is 4.17×10^(-12)~1.09×10^(-11) Pa·m^(3)/(cm^(2)·s·Pa),and the leak element with a lower limit leak rate of 10-12 Pa·m^(3)/s can be made by adjusting the penetration area of the composite membranes.

关 键 词：石墨烯 标准漏孔 极小漏率 

分 类 号：TB774[一般工业技术—真空技术]