一种基于无转移PMMA和PI的渗透性标准漏孔的氦气渗透性能研究  

Helium Permeation Performance Study of a Permeable Standard Leak Element Based onTransfer-free PMMA and Pl

作　　者：方庆国 王宗林 张俊 王旭迪[1] FANG Qing-guo;WANG Zong-in;ZHANG Jun;WANG Xu-di(School of Mechanical Engineering,Hefei University of Technology,Hefei 230009,China)

机构地区：[1]合肥工业大学机械工程学院,安徽合肥230009

出　　处：《真空》2024年第1期68-73,共6页Vacuum

基　　金：国家自然科学基金项目(62201188)。

摘　　要：研制了一种基于无转移聚甲基丙烯酸甲酯(PMMA)或聚酰亚胺(PI)的漏孔元件。通过在铜箔上旋涂PMMA或PI,另一面旋涂光刻胶,并利用紫外光刻打孔,在铜箔上刻蚀出了不同阵列的直径约10μm的小孔。基于差压法测量了氦气通过该标准漏孔元件的流导。结果表明:在从5 kPa到105 Pa压力范围内,各测试样品均表现出分子流动状态;无转移PMMA或PI的流导和有效渗透面积呈线性关系,可通过控制小孔数量来控制PMMA或PI的有效渗透面积,从而获得不同的流导;所开发的无转移PMMA或PI为优良的低渗透漏孔理想材料。A standard leak element based on transfer-free polymethylmethacrylate(PMMA)or polyimide(PI)was developed.The fabrication process involved spin-coating PMMA or PI on a copper foil,followed by spin-coating photoresist on the opposite side,and subsequently creating small holes of different arrays with a diameter of about 10μm on the copper foil using UV lithography.The flow conductance of helium through the leak element was measured by the differential pressure method.The results show that the samples all exhibite a molecular flow regime within the pressure range from 5 kPa to 105 Pa.The flow conductance of transfer-free PMMA or PI shows a linear relationship with the effective permeation area,and the effective permeability area of PMMA or PI can be controlled by controlling the number of small holes,thereby obtaining different flow conductance.The transfer-free PMMA or PI materials developed in this study are ideal for low-permeation leak elements.

关 键 词：无转移 聚甲基丙烯酸甲酯 聚酰亚胺 渗透型漏孔 恒定流导 

分 类 号：TB77[一般工业技术—真空技术]