螺旋波等离子体放电特性研究进展  

RECENT PROGRESS ON DISCHARGE CHARACTERISTICS OF HELICON PLASMA

作　　者：张海宝[1] 尹贤轶 孙萌[1] 陈强[1] Zhang Haibao;Yin Xianyi;Sun Meng;Chen Qiang(Laboratory of Plasma Physics and Materials,Beijing Institute of Graphic Communication,Beijing 102600,China)

机构地区：[1]北京印刷学院等离子体物理与材料实验室,北京102600

出　　处：《力学学报》2023年第12期2913-2927,共15页Chinese Journal of Theoretical and Applied Mechanics

基　　金：国家自然科学基金(11875090);北京市自然科学基金(1192008)资助项目.

摘　　要：螺旋波等离子体是目前低温等离子体产生密度最高的等离子体源之一,在材料处理、薄膜沉积、宇航推进、磁约束聚变以及基础等离子体物理研究等领域都有很大的应用潜力.近年来国内外研究者普遍关注这种高密度等离子体源,一方面人们对螺旋波等离子体的放电理论缺乏深入的认识,对等离子体激发和传播过程中能量的吸收存在多种假设,比较认可的是螺旋波等离子体通过螺旋波与TG波耦合效应实现能量沉积;另一方面,螺旋波等离子体放电过程中会表现出许多独特的现象,如低场峰、模式跃迁、无电流双层结构等,无法给出统一的解释,对这些放电特性的研究无疑有助于加深对螺旋波等离子体放电机制的理解.文章从放电机制和放电特性两方面出发回顾了近15年来螺旋波等离子体基础研究进展,总结了螺旋波等离子体放电过程中的低场峰现象、模式跃迁和无电流双层现象等研究结果.围绕螺旋波等离子体放电特性研究,展望了未来的研究重点,为理解螺旋波等离子体能量耦合机制,实现工业应用提供支撑.Helicon plasma is one of the highest density plasma sources for generating the low-temperature plasma nowadays.It has great application potential in the fields of material processing,thin film deposition,aerospace propulsion,magnetic confinement fusion,and basic plasma physics research.It has received extensive attention from researchers worldwide in recent years.However,people lack in-depth understanding of the discharge theory of helicon plasma.There are various hypotheses about the absorption of energy during plasma excitation and propagation.It is more recognized that energy deposition is achieved by coupling the helicon wave and TG wave in the helicon plasma.At the same time,many unique phenomena,such as low-field peak,mode transition,current-free double layer(CFDL),have been demonstrated during the helicon plasma discharge process,which cannot be explained uniformly.It is sure that the investigation on the discharge characteristics will help to deepen the understanding of the discharge mechanism of helicon plasma.In this paper,the basic research progress on helicon plasma in the past 15 years was reviewed from the aspects of discharge mechanism and discharge characteristics.The results of low-field peak phenomenon,mode transition,and CFDL phenomenon during helicon plasma discharge were summarized.Focusing on the research on the discharge characteristics of helicon plasma,the future directions were prospected,which provides support for understanding the coupling mechanism of helicon plasma discharge and realizing engineering applications.

关 键 词：螺旋波等离子体 放电特性 低场峰 模式跃迁 无电流双层结构 

分 类 号：V211.12[航空宇航科学与技术—航空宇航推进理论与工程]