多场耦合非热平衡低温等离子体与微纳米结构材料的相互作用  

INTERACTION OF MULTI-FIELD COUPLED LOW TEMPERATURE PLASMA WITH MICRO AND NANO STRUCTURED MATERIALS

作　　者：徐少锋 徐雨 丁可[1] 黄晓江[1] 唐晓亮[1] 杨沁玉[1] 杨唯 彭释 王超梁 昌锡江 卢洪伟 施芸城[1] 郭颖[1] 杜诚然 石建军 钟方川[1] 徐金洲 张菁[1] Xu Shaofeng;Xu Yu;Ding Ke;Huang Xiaojiang;Tang Xiaoliang;Yang Qinyu;Yang Wei;Peng Shi;Wang Chaoliang;Chang Xijiang;Lu Hongwei;Shi Yuncheng;Guo Ying;Du Chengran;Shi Jianjun;Zhong Fangchuan;Xu Jinzhou;Zhang Jing(Member of Magnetic Confinement Fusion Research Center of Ministry of Education,Textile Key Laboratory for Advanced Plasma Technology and Application,College of Science,Donghua University,Shanghai 201620,China;Hangzhou HFC Semiconductor,Hangzhou 310000,China;Yiwu Research Institute of Fudan University,Yiwu 322099,Zhejiang,China)

机构地区：[1]东华大学理学院,纺织行业先进等离子体技术与应用重点实验室,磁约束核聚变教育部研究中心,上海201620 [2]杭州积海半导体有限公司,杭州310000 [3]复旦大学义乌研究院,浙江义乌322099

出　　处：《力学学报》2023年第12期2955-2980,共26页Chinese Journal of Theoretical and Applied Mechanics

基　　金：国家自然科学基金资助项目(12075054,11875104).

摘　　要：低温等离子体是制备微纳米材料和调控其结构特性的最重要方法之一,其中材料结构及特性的改变是等离子体电磁场、热场、化学场等多场耦合综合作用的结果.本文系统而简要地回顾了如下主要内容:电源的频率及其调制、施加方式对等离子体放电特性与稳定性的影响;大气压等离子体物理化学反应动力学;等离子体场对微纳米颗粒的聚集态结构与运动的调控、以及对沉积薄膜微纳米结构的影响.总结并得出如下主要结论:放电频率、脉冲调制功率、容性或者感性耦合方式、单体种类、基片温度等对等离子体活性粒子成分与特性具有主要影响,在kHz~MHz范围可以实现稳定放电和微纳米颗粒制备和薄膜沉积;微纳米颗粒/颗粒膜结构形貌随时间和空间而发生动态变化;低温等离子体多场调制可以快速实现微纳米颗粒的结晶,并调控微纳米颗粒的成分、尺度、带隙、晶型、晶面比例及其形貌特征;引入微颗粒可以在鞘层位置悬浮形成规则的二维等离子体晶格与无序的等离子体非晶,在介观尺度研究复杂系统的结构与动理学过程.Low-temperature plasma is one of the most important methods for preparing micro-nano particle materials and regulating their structure and properties.The changes of material structure and properties results from the coupling of plasma electromagnetic field,thermal field,and chemical field.This paper systematically and briefly reviews the following main contents:the influence of the frequency of the power supply,its modulation and application mode on the characteristics and stability of plasma discharge;Physicochemical reaction kinetics of plasma at atmospheric pressure;The influence of plasma field on the aggregation structure and motion of micro-nano particles and the micro-nano structure of deposited films.The main conclusions are summarized as follows:frequency,pulse modulation and capacitive or inductive coupling type,monomer composition etc.,have a major impact on the composition and characteristics of active plasma species.A stable discharge can be achieved in the range of kHz~MHz for the micronano particle preparation and thin film deposition.Microparticles can be levitated at the sheath and form a 2D particle suspension with crystalline and amorphous structure.The low-temperature plasma multi-field modulation can quickly achieve the crystallization of micro-nano particles,and regulate the composition,scale,crystallinity,band gap,crystal type,crystal surface ratio and morphology characteristics of micro-nano film.By introducing the microparticles suspended in the sheath to form regular two-dimensional plasma lattices and disordered plasma amorphous crystals,the structure and kinetics of complex systems are studied at mesoscale.

关 键 词：低温等离子体 多场耦合 微纳米颗粒 功能薄膜 结构调控 

分 类 号：O53[理学—等离子体物理] O531[理学—物理] O539