锗基长波红外圆锥形微结构减反射性能  

Antireflection Performance of the Conical Microstructures of Germanium Substrate in Long-Wavelength Infrared

作　　者：汤克彬 李珊[1] 李初晨 毛科 张顺关 曾绍禹 TANG Kebin;LI Shan;LI Chuchen;MAO Ke;ZHANG Shunguan;ZENG Shaoyu(Faculty of Mechanical and Electrical Engineering,Kunming University of Science and Technology,Kunming 650500,China)

机构地区：[1]昆明理工大学机电工程学院,云南昆明650500

出　　处：《红外技术》2024年第1期36-42,共7页Infrared Technology

基　　金：国家自然科学基金(51765027)。

摘　　要：锗是重要的红外光学材料,为减小锗表面的菲涅耳反射损耗,提高光利用率,研究了锗基底圆锥形微结构的减反射性能。基于时域有限差分法(Finite Difference Time Domain),并采用单因素法研究了微结构的占空比、周期、高度等结构参数与入射角在8~12μm长波红外波段对反射率的影响,确定了微结构在低反射情况下较优的结构参数组合,其在整个波段范围内的平均反射率低于1%,远低于平板锗结构的35.47%,在9~11μm的波段范围内反射率低于0.5%,且光波在40°范围内入射时,圆锥形微结构的平均反射率仍然较低。将优化的圆锥形微结构与平板结构进行了对比,从等效折射率、反射场分布和能量吸收分布3方面进一步证实了圆锥形微结构在整个波段范围内优异的减反射性能。Germanium is an important infrared optical material.To reduce Fresnel reflection loss on the germanium surface and improve the light utilization rate,the anti-reflection performance of the conical microstructure on a germanium substrate was studied.Based on the finite difference time domain(FDTD)method and the single factor method,the effects of the microstructure parameters,such as duty ratio,period,height,and the angle of incidence on reflectivity are discussed for the 8mm to 12μm long-wavelength infrared band.The structural parameters of the microstructure at low reflection was determined.Its average reflectivity over the entire wavelength range is less than 1%,which is much lower than the 35.47%reflectivity of the slab germanium structure,and the reflectivity in the wavelength range of 9μm to 11mm is less than 0.5%.The average reflectivity of the conical microstructure remained low when light was incident at 40°.By comparing the optimized conical microstructure with the slab structure,the excellent antireflection performance of the conical microstructure over the entire wavelength range was further confirmed based on the equivalent refractive index,reflected electric field intensity distribution,and absorption per unit volume.

关 键 词：亚波长结构 时域有限差分法 锗基微结构 减反射 长波红外 

分 类 号：O435[机械工程—光学工程]