Ag纳米颗粒增强SnO_(2)纳米薄膜的室温气敏性能研究  

Research on gas sensing property of SnO_(2) nanofilms by Ag nanoparticles enhancing at room temperature

作　　者：刘文强 吴鹏举 王瑗瑗 连艳利 杨莹丽[3] LIU Wenqiang;WU Pengju;WANG Yuanyuan;LIAN Yanli;YANG Yingli(School of Physics and Electronic Information Engineering,Henan Polytechnic University,Jiaozuo 454003,China;China United Network Communication Co Ltd Jiaozuo Branch,Jiaozuo 454000,China;Instrumental Analysis Center,Henan Polytechnic University,Jiaozuo 454003,China)

机构地区：[1]河南理工大学物理与电子信息学院,河南焦作454003 [2]中国联合网络通信有限公司焦作市分公司,河南焦作454000 [3]河南理工大学分析测试中心,河南焦作454003

出　　处：《传感器与微系统》2024年第2期45-48,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(62173128);河南省高校科技创新团队支持计划资助项目(21IRTSTHN016);河南省高校基本科研业务费资助项目(NSFRF210324)。

摘　　要：采用磁控溅射法在p-Si衬底上沉积二氧化锡(SnO_(2))纳米薄膜并在其上负载银(Ag)纳米颗粒作为气体传感器的敏感材料。实验结果表明:负载Ag纳米颗粒提高了SnO_(2)纳米薄膜的灵敏度。Ag溅射时间为80 s,负载量为6%质量分数的SnO_(2)纳米薄膜对乙醇气体的响应值较未负载Ag纳米颗粒时提高了78.7%,这可以归因于Ag纳米颗粒与SnO_(2)纳米薄膜之间形成了异质结。实验测试了工作电压对SnO_(2)纳米薄膜灵敏度的影响,当工作电压均为5.5 V时,传感器对乙醇和丙酮气体的响应最佳,响应值分别为3.49和4.51。SnO_(2) nanofilms are deposited on p-Si substrates by magnetron sputtering method and Ag nanoparticles are loaded on them as sensitive materials for gas sensors.The experimental results show Ag nanoparticles improve the sensitivity of SnO_(2) nanofilms.The response value of SnO_(2) nanofilm with Ag sputtering time of 80 s and mass fraction of 6%loading to ethanol gas is 78.7%increased than that of SnO_(2) nanofilm without Ag nanoparticles loaded.This improvement can be attributed to the formation of heterojunction between Ag nanoparticles and SnO_(2) nanofilm.The effect of working voltage on the sensitivity of SnO_(2) nanofilm is experimentally tested.When the operating voltage is 5.5 V,the senor has the optimal response to ethanol and acetone,and the response values are 3.49 and 4.51,respectively.

关 键 词：二氧化锡纳米薄膜 AG纳米颗粒 异质结 气体传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]