ZnO/Ecoflex自驱动柔性压电传感器及其人体姿态监测微系统设计  

Design of ZnO/Ecoflex Self-Driven Flexible Piezoelectric Sensor and Its Human Posture Monitoring Microsystem

作　　者：王利斌 王博 陈良良 张转玲 Wang Libin;Wang Bo;Chen Liangliang;Zhang Zhuanling(Bejing Institute of Structure and Environment Engineering,Beijing 100076,China;Shanxi Vocational University of Engineering Science and Technology,Jinzhong 030619,China)

机构地区：[1]北京强度环境研究所,北京100076 [2]山西工程科技职业大学,山西晋中030619

出　　处：《微纳电子技术》2024年第1期124-130,共7页Micronanoelectronic Technology

摘　　要：压力传感器是可穿戴电子设备的重要组成部分,但在能量供应、灵活性和皮肤适应性方面仍存在各种问题。研制了一种主要由ZnO/Ecoflex复合薄膜构成的自驱动柔性压力传感器,并构建了人体姿态监测系统,可用于动态监测人体姿态信号和其他运动参数。在外部压力应力的作用下,所制备的传感器表现出优异的灵敏度(0.068 V/N)、良好的线性度(约0.98)、宽的测量范围(5~80 N)以及卓越的耐久性(超过10000次循环)。此外,基于制备的传感器设计了硬件电路,建立了人机交互测试系统,实现了对人体姿态信号的远程传输功能。因此,这项工作不仅开发了一种新型的无铅化自驱动压力传感器,还设计了人体姿态监测微系统,为信号处理和智能传感提供了新思路,在医学研究、个性化识别和人机交互方面具有重要的应用潜力。Pressure sensor is an important component of wearable electronic devices,but there are still various issues in terms of energy supply,flexibility and skin adaptability.A self-driven flexible pressure sensor mainly composed of ZnO/Ecoflex composite films was developed,and a human posture monitoring system was constructed,which can be used for dynamic monitoring of human posture signals and other motion parameters.Under the action of external pressure stress,the prepared sensor exhibits excellent sensitivity(0.068 V/N),good linearity(about 0.98),wide measurement range(5-80 N)and excellent durability(over 10000 cycles).In addition,based on the prepared sensor,hardware circuits were designed,a human-machine interaction testing system was established to achieve remote transmission function of human posture signals.Therefore,the work develops a new type of lead-free self-driven pressure sensor,and designs a human posture monitoring microsystem,providing a new idea for signal processing and intelligent sensing,and has important application potential in medical research,personalized recognition and human-machine interaction.

关 键 词：柔性压电传感器 ZnO/Ecoflex复合薄膜 自驱动 人体姿态监测 可穿戴电子设备 人机交互 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TB33[自动化与计算机技术—控制科学与工程] TH86[一般工业技术—材料科学与工程]