基于CMUT环形阵列的反射超声成像方法  

Reflection Ultrasonic Imaging Method Based on CMUT Ring Array

作　　者：秦祚敏 薛铮 刘书睿 张国军[1] 杨玉华[1] 张文栋[1] 何常德[1] Qin Zuomin;Xue Zheng;Liu Shurui;Zhang Guojun;Yang Yuhua;Zhang Wendong;He Changde(State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China;Beijing Institute of Astronautical System Engineering,Beijing 100076,China)

机构地区：[1]中北大学省部共建动态测试技术国家重点实验室,太原030051 [2]北京宇航系统工程研究所,北京100076

出　　处：《微纳电子技术》2024年第1期137-143,共7页Micronanoelectronic Technology

基　　金：国家自然科学基金国家重大科研仪器研制项目(61927807);国家重点研发计划(2022YFB3205400);省部共建动态测试技术国家重点实验室基金(2022-SYSJJ-05)。

摘　　要：电容式微机械超声换能器(CMUT)具有频带宽、制造成本低、易与电路集成等优点,在医学成像领域具有广阔的应用前景。CMUT高密度阵元、低制造成本的特点使其拥有制备超声环形阵列独特的优势。基于CMUT环形阵列提出了反射式超声成像算法,采用k-Wave工具箱搭建模型进行仿真实验,验证了算法的可行性。搭建了基于32阵元CMUT环形阵列的超声成像验证平台,通过旋转实现稀疏阵元的反射式超声成像。图像重建结果表明,该反射成像算法可实现目标体重建,目标体直径测试值为6.14 cm,与目标体直径实际值6.00 cm相比,成像误差为2.33%,验证了CMUT环形阵列在超声成像中应用的可行性。该研究为进一步研制基于高密度CMUT换能器的超声成像系统提供了参考。Capacitive micromechanical ultrasonic transducers(CMUTs)have the advantages of wide frequency band,low manufacturing cost and easy integration with circuits,so have broad application prospect in the field of medical imaging.Due to high density array and low manufacturing cost,CMUTs have unique advantage in the fabrication of ultrasonic ring arrays.Based on CMUT ring array,the reflection ultrasonic imaging algorithm was proposed.k-Wave toolbox was used to build a model for simulation experiments,and the feasibility of the algorithm was verified.An ultrasonic imaging validation platform based on 32-element CMUT ring array was built,and the reflection ultrasonic imaging of sparse array element was realized by rotation.Image reconstruction results show that the reflection imaging algorithm can achieve target construction,and the measured value of target diameter is 6.14 cm.Compared with the actual value of target diameter of 6.00 cm,the imaging error is 2.33%,which verifies the feasibility of the application of CMUT ring array in ultrasonic imaging.The study provides a reference for further development of ultrasonic imaging system based on high density CMUT transducers.

关 键 词：电容式微机械超声换能器(CMUT) 环形阵列 反射 超声成像 医学成像 

分 类 号：TB552[理学—物理]