基于可控剥离技术的柔性反铁电薄膜固态制冷技术  

Solid-State Cooling Technology of Flexible Antiferroelectric Film Based on Controllable Spalling Technology

作　　者：乔骁骏 王静慧 李雅青 耿文平[1,2] Qiao Xiaojun;Wang Jinghui;Li Yaqing;Geng Wenping(School of Semiconductor and Physics,North University of China,Taiyuan 030051,China;Key Laboratory of Instrumentation Science and Dynamic Measurement of Ministry of Education,North University of China,Taiyuan 030051,China;School of International Studies,University Utara Malaysia,Kedah 06010,Malaysia)

机构地区：[1]中北大学半导体与物理学院,太原030051 [2]中北大学仪器科学与动态测试教育部重点实验室,太原030051 [3]马来西亚北方大学国际教育学院,吉打州06010

出　　处：《微纳电子技术》2024年第2期54-61,共8页Micronanoelectronic Technology

基　　金：国家自然科学基金面上项目(62171415);山西省自然科学基金资助项目(202203021222068)。

摘　　要：反铁电薄膜具有强大的偶极子动力学可调特性,在储能电容器和固态制冷领域表现出巨大的潜力,因此有必要对柔性反铁电薄膜的固态制冷进行研究。采用溶胶-凝胶技术在蓝宝石衬底上制备了Pb_(0.97)La_(0.02)Zr_(0.95)Ti_(0.05)O_(3)(PLZT)薄膜,并通过可控剥离技术将其柔性化。柔性反铁电薄膜的极化特性在不同的外加偏压下表现出典型的滞回特性,并在外加电场驱动下表现出巨大的负电卡响应。结果表明,柔性反铁电薄膜室温下绝热温度变化为-6.9 K,在450 kV/cm的电场强度下,205 K时获得了-9.5 K的最大绝热温度变化。本研究为可穿戴柔性设备和场景的固态制冷提供可行性,同时为其他功能薄膜的柔性集成制造提供了技术基础。Antiferroelectric film has strong dipole dynamics tunable properties,showing great potential in the field of energy storage capacitors and solid-state cooling.Therefore,it is necessary to study the solid-state cooling of flexible antiferroelectric films.Pb_(0.97)La_(0.02)Zr_(0.95)Ti_(0.05)O_(3)(PLZT)film was prepared on the sapphire substrate by sol-gel technology,and the film was flexible by controlled spalling technology.The polarization properties of flexible antiferroelectric film show typical hysteretic characteristics at different applied bias voltages,exhibiting the great negative electrocaloric response when driven by applied electric field.The results show that the adiabatic temperature change of flexible antiferroelectric film is-6.9 K at room temperature and the maximum adiabatic temperature change of-9.5 K is obtained at 205 K under an electric field intensity of 450 kV/cm.The research offers the feasibility for solid-state cooling of wearable flexible devices and scenarios,and also provides a technical basis for flexible integrated manufacturing of other functional films.

关 键 词：反铁电薄膜 柔性材料 Pb_(0.97)La_(0.02)Zr_(0.95)Ti_(0.05)O_(3)(PLZT) 储能电容器 固态制冷 柔性集成制造 

分 类 号：TB34[一般工业技术—材料科学与工程] TN384[电子电信—物理电子学]