浮动元件壁面剪切应力传感器研究进展  

Research progress on floating element wall shear stress sensors

作　　者：付政伟 杨水旺 张琦 苏一鸣 张洁 FU Zhengwei;YANG Shuiwang;ZHANG Qi;SU Yiming;ZHANG Jie(Beijing Zhenxing Institute of Metrology and Measurement,Beijing 100074,China)

机构地区：[1]北京振兴计量测试研究所,北京100074

出　　处：《计测技术》2023年第6期20-29,共10页Metrology & Measurement Technology

基　　金：北京振兴计量测试研究所青年创新项目(99300004636)。

摘　　要：介绍了浮动元件的类型和浮动元件壁面剪切应力测量的方法,阐述了基于浮动元件的电容式、压阻式和光学式壁面剪切应力传感器的基本原理和研究现状,分析了上述3种类型的浮动元件壁面剪切应力传感器的优缺点,指出可通过优化浮动元件与传感器封装件之间的移动间隙以及浮动元件与被测面间的平齐度来提升浮动元件壁面剪切应力传感器的性能。展望了浮动元件壁面剪切应力传感器在湍流测量、判断边界层转捩、维护飞行器安全和优化飞行器结构等领域的发展方向,提出未来可通过发展MEMS技术、优化传感器后端处理电路和温度补偿方式、采用一体化设计加工方式等,进一步提升浮动元件壁面剪切应力传感器的小型化程度、检测壁面剪切应力极低值时的灵敏度和精度、测量的可靠性和准确性。This paper introduces the types of floating elements and the measurement method of wall shear stress of floating elements.The basic principles and research status of capacitive,piezoresistive and optical wall shear stress sensors based on floating elements are described.The advantages and disadvantages of the three types of floating element wall shear stress sensors are analyzed.It is pointed out that the performance of the floating element wall shear stress sensor can be improved by optimizing the moving gap between the floating element and the sensor package,as well as the flatness between the floating element and the measured surface.The development direction of wall shear stress sensor with floating element in turbulent flow measurement,boundary layer transition judgment,aircraft safety maintenance and optimization of aircraft structure is also discussed.In the future,it is suggested that the MEMS technology can be developed,the back⁃end processing circuit and temperature compensation of the sensor can be optimized,and the moving gap and uniformity between the floating element sensor structures can be optimized by the integrated design and processing method to further improve the miniaturization of the floating element wall shear stress sensor,the sensitivity and accuracy of detecting the extremely low value of wall shear stress,and the reliability and accuracy of measurement.

关 键 词：浮动元件传感器 壁面剪切应力测量 电容式 压阻式 光学式 

分 类 号：TB93[一般工业技术—计量学] TH823[机械工程—测试计量技术及仪器]