耐高功率声表面波器件多层复合金属薄膜电极的分析  

Analysis of Multi-layer Composite Metal Thin Film Electrodes for High-power Surface Acoustic Wave Devices

作　　者：赵志娟 刘永红 雷雅雯 张虹 雷顺京 ZHAO Zhijuan;LIU Yonghong;LEI Yawen;ZHANG Hong;LEI Shunjing(Ningxia Sawtech Co.,Ltd.,Ningxia 750011,China)

机构地区：[1]宁夏索特科新型器件有限公司,宁夏750011

出　　处：《电子技术（上海）》2023年第11期4-5,共2页Electronic Technology

摘　　要：阐述一种采用多层复合金属薄膜电极的方法来提高声表面波器件的耐功率特性。试验结果表明,这种多层复合金属薄膜电极比纯铝电极有更高的功率承受力。This paper describes a method of using multi-layer composite metal thin film electrodes to improve the power resistance characteristics of surface acoustic wave devices.The experimental results indicate that this multi-layer composite metal film electrode has higher power endurance than pure aluminum electrodes.

关 键 词：声表面波(SAW) 功率特性 多层复合 金属薄膜电极 

分 类 号：TN65[电子电信—电路与系统]