45°双驱动弹光调制高速椭偏测量方法  

Fast ellipsometric measurements based on 45°dual-drive photoelastic modulation

作　　者：薛鹏 刘燕霖[2,3] 谢大洋 张瑞 王志斌[2,3] XUE Peng;LIU Yanlin;XIE Dayang;ZHANG Rui;WANG Zhibin(School of Electrical and Control Engineering,North University of China,Taiyuan 030051,China;Provincial Photoelectric Information and Instrument Engineering Technical Research Center,North University of China,Taiyuan 030051,China;Research Institute of Advanced Interdisciplinary Science,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学电气与控制工程学院,太原030051 [2]中北大学山西省光电信息与仪器工程技术研究中心,太原030051 [3]中北大学前沿交叉科学研究院,太原030051

出　　处：《激光杂志》2024年第1期65-69,共5页Laser Journal

基　　金：国家自然科学基金(No.62105302);山西省基础研究计划(No.20210302124269)。

摘　　要：为解决传统机械旋转补偿器型椭偏仪测量速度较慢问题,提出一种电驱动的双弹光调制的高速椭偏测量方法。通过理论分析并仿真研究45°双驱动弹光调制器工作在纯行波模式下的调制方式。结果发现,当双驱动弹光调制器工作在纯行波模式可实现快轴方向的高速周期性旋转,且相位延迟量为常量。结合椭偏原理,详细研究一种基于双驱动弹光调制的高速椭偏测量理论模型,结果表明,该模型光学周期<10μs,用于实际可真正实现超高速偏光调制。通过研究,有望解决半导体集成电路,微电子和光伏电池等生产过程中薄膜超高速检测难题,对薄膜在线检测、瞬态变化测量具有重要意义和学术价值。A technique of fast ellipsometric measurements based on dual-drive elastic modulation is proposed in paper,for which the measurement speed of traditional mechanical rotary compensator ellipsometer is slow.The modulation mode of 45°dual-drive photoelastic modulator(PEM)working in pure traveling wave mode was studied by theoretical analysis and simulation.The results show that the fast axis direction can high-speed periodic rotation and the phase delay is constant when the PEM working in pure traveling wave mode.Combined with the principle of ellipsometry,a theoretical model of fast ellipsometric measurement based on dual drive PEM was studied in detail.The results show that the optical period of this model was less than 10μs,and the ultra-high speed optical modulation could be realized.With this study,it is expected to solve the problem of ultra-high speed detection of thin films in the production process of semiconductor integrated circuits,microelectronics and photovoltaic cells.It is of great significance and academic value for in-line measurement of thin films.

关 键 词：厚度测量 光弹性 高速椭偏测量技术 弹光调制器 在线检测 Comsol有限元仿真 

分 类 号：TN247[电子电信—物理电子学]