集成冷光学的双波段杜瓦组件技术  

Dewar Assembly Integrated with Cryogenic Optics for Dual-Band IR Detector

作　　者：曾智江[1,2,3] 杨力怡 郝振贻[1,2] 徐琳[1,2] 范广宇[1,2] 范崔[1,2,3] 李俊 李雪[1,2] 龚海梅[1,2] Zeng Zhijiang;Yang Liyi;Hao Zhenyi;Xu Lin;Fan Guangyu;Fan Cui;Li Jun;Li Xue;Gong Haimei(State Key Laboratories of Transducer Technology,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China;Key Laboratory of Infrared Imaging Materials and Detectors,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China;University of Chinese Academy of Sciences,Beijing 100039,China)

机构地区：[1]中国科学院上海技术物理研究所传感技术国家重点实验室,上海200083 [2]中国科学院上海技术物理研究所红外成像材料与器件重点实验室,上海200083 [3]中国科学院大学,北京100039

出　　处：《中国激光》2023年第23期229-237,共9页Chinese Journal of Lasers

基　　金：国家自然科学基金(11427901)。

摘　　要：集成冷光学的红外探测器杜瓦封装在中波、长波红外组件研制中具有重要意义,有利于抑制红外辐射背景、提升仪器灵敏度和集成度。提出了集成冷光学的中波、长波双波段探测器杜瓦组件,设计了一体化冷平台支撑、低漏热透镜支撑等新结构,解决了冷光学透镜组与探测器组合、双波段探测器透镜组之间高精度配准及高强度单点支撑钎焊等新工艺,建立了该冷光学集成组件杜瓦的冷面温度均匀性、双温区控制以及低热负载等关键参数。实现了杜瓦液氮热负载小于0.85 W,中波工作于73 K,冷面温度均匀性0.36 K,长波工作于65 K,冷面温度均匀性0.08 K,探测器与透镜组配准精度偏差优于±10μm,探测器光学模组间配准偏差优于±15μm。该新型杜瓦已通过一系列空间环境适应性试验验证,成功应用于风云四号系列气象卫星大气垂直探测仪中。Objective For some infrared(IR)optical systems,due to the wide field of view of the instrument,some cryogenic optical lenses must be packaged near the detector,otherwise the entire optical system will be very complicated.Moreover,for weak signal and multi-spectral detection,it is necessary to reduce the background.Except IR detectors,if several cold filters and lenses are housed in Dewar,then it is conducive to eliminating the infrared radiation background,improving system sensitivity and integration.This paper presents the package of mid-wave infrared(MWIR)and long-wave infrared(LWIR)detectors Dewar with integrated cryogenic optics.The micron-scale alignment requirement of a 32×4 array detector with a pitch of 120μm×120μm and a dual-lens module at each band is comprehensively described.The key parameters such as detectors temperature uniformity,differential temperature packaging and low thermal mass are analyzed.We hope that Dewar package structure integrating 4 lenses,2 optical filters and 2 detectors will be successfully developed.Methods First,several lenses and detectors are packaged,so the size of the Dewar cold platform is large,and the mass of the infrared detector Dewar cold finger and its top load reaches 364.7 g.If the acceleration in space application is 500 m/s2,the maximum stress at the root of the cold finger can be calculated to be 352.9 MPa.In order to ensure the reliability under environmental vibration,it is necessary to use a new titanium alloy TC4 as the cold finger material,which can not only ensure sufficient mechanical strength,but also effectively reduce Dewar thermal loss.Secondly,in order to solve the problems of large longitudinal and axial thermal resistance between the detector,the cold lenses and the cold filter,as well as the low temperature uniformity of the detector array,both low thermal resistance heat transfer and the structure to realize differential temperature of the detectors are required.The cold platform is designed as the shared base of alignment for MWIR and LWIR d

关 键 词：光学设计 双波段红外探测器 杜瓦集成封装 冷光学 低温透镜组 高精度配准 

分 类 号：TN215[电子电信—物理电子学]