基于镀钯微悬臂梁探针的光纤氢气传感器  

Optical Fiber Hydrogen Sensor Based on Pd-Coated Microcantilever

作　　者：张莉超 黄嘉斌 徐磊 王义平[2] 廖常锐[2] Zhang Lichao;Huang Jiabin;Xu Lei;Wang Yiping;Liao Changrui(School of Intelligent Manufacturing and Equipment,Shenzhen Institute of Information Technology,Shenzhen 518172,Guangdong,China;Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing,Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province,College of Physics and Optoelectronic Engineering,Shenzhen University,Shenzhen 518060,Guangdong,China;School of Electronic and Communication Engineering,Shenzhen Polytechnic University,Shenzhen 518055,Guangdong,China)

机构地区：[1]深圳信息职业技术学院智能制造与装备学院,广东深圳518172 [2]深圳大学物理与光电工程学院光电子器件与系统教育部/广东省重点实验室深圳市超快激光微纳制造重点实验室,广东深圳518060 [3]深圳职业技术大学电子与通信工程学院,广东深圳518055

出　　处：《激光与光电子学进展》2023年第23期123-129,共7页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(62101353,62122057);中国博士后基金项目(2018M643164);广东省基础与应用基础研究基金项目(2022B1515120061);深圳市科技计划项目(RCYX20200714114524139;深圳市超快激光微纳制造重点实验室ZD⁃SYS20220606100405013,JCYJ20190808161019406)。

摘　　要：为了快速检测氢气泄漏,迫切需要开发一种更安全、浓度检测下限更低的氢气传感器。将镀有钯膜的微悬臂梁探针与单模光纤端面进行组装,设计了一种易制备且低成本的光纤氢气传感器。实验结果表明,该传感器具有超高的氢气响应灵敏度,约为−9.887μm/%,同时具有低至1.76×10^(−3)%的超低检测下限和优异的重复性。在痕量氢气体积分数条件下,该传感器对氢气体积分数表现出优异的线性响应,这对痕量气体检测具有重要意义,使其在氢能源电池、核电站和太空探索中具有重要的应用价值。In order to quickly detect hydrogen leaks,there is an urgent need to develop a safer and lower concentration detection lower limit hydrogen sensor.This article assembles a micro cantilever beam probe coated with palladium film with a single-mode fiber end face,and designs an easy to prepare and low-cost fiber optic hydrogen sensor.The experimental results show that the sensor has an ultra-high hydrogen response sensitivity of about−9.887μm/%,while also having an ultra-low detection lower limit as low as 1.76×10^(−3)%and excellent repeatability.Under the conditions of trace hydrogen volume fraction,the sensor exhibits excellent linear response to hydrogen volume fraction,which is of great significance for trace gas detection and has important application value in hydrogen energy batteries,nuclear power plants,and space exploration.

关 键 词：光纤传感器 氢气检测 微悬臂梁 钯膜 

分 类 号：TP212.9[自动化与计算机技术—检测技术与自动化装置]