基于单向多次平移的矩形平面反射镜绝对检测  

Absolute Measurement of Rectangular Flat Mirrors Using aUnidirectional Multi-Shifted Method

作　　者：周广 类维政 董晓浩 王劼[1,2] Zhou Guang;Lei Weizheng;Dong Xiaohao;Wang Jie(Shanghai Institute of Applied Physics,Chinese Academy of Sciences,Shanghai 201800,China;Shanghai Advanced Research Institute,Chinese Academy of Sciences,Shanghai 201210,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院上海应用物理研究所,上海201800 [2]中国科学院上海高等研究院,上海201210 [3]中国科学院大学,北京100049

出　　处：《激光与光电子学进展》2023年第23期137-144,共8页Laser & Optoelectronics Progress

基　　金：国家自然科学联合基金(U1832172);上海市市级科技重大专项(2017SHZDZX02);中科院“BR计划”人才项目(2018)。

摘　　要：随着相干光源的发展,对大尺寸高精度反射镜的表面光滑度要求不断提高。针对X射线使用的高长宽比矩形平面反射镜,发展了一种基于激光干涉平移剪切法的二维绝对检测方法,以单方向多次平移测量取代正交方向的平移测量,推导出多矩阵增广区域法重构算法,获得了高精度矩形平面镜的绝对面形。经过仿真模拟,在不考虑噪声时,得到的绝对面形与初始面形的残差均方根(RMS)为0.03 nm(~λ/20000);在考虑随机高斯噪声时,重点模拟分析了不同平移次数和平移距离下的面形恢复情况。对120 mm×40 mm的矩形平面镜进行了实验验证,测量恢复的绝对面形与三平板法得到的绝对面形RMS为1.07 nm(λ/591)。模拟和实验结果均表明:所提方法可有效地获得高精度矩形平面反射镜的二维绝对面形,且单方向平移也为发展基于绝对检测的多孔径拼接测量奠定了基础。With the development of advanced light sources,surface smoothness is becoming crucial for large-sized and high-precision mirrors.In this study,a two-dimensional(2D)absolute metrology method is developed that is based on the laser interferometer translational shear method for high aspect ratio rectangular flat mirrors used in X-rays.In this method,translational measurements in orthogonal directions are replaced with multiple shifted measurements in a single direction.In addition,a multi-matrix augmented zonal method reconstruction algorithm is derived to obtain the absolute surface shape of high-precision rectangular flat mirrors.Through simulations,the root mean square(RMS)of the residuals between the reconstructed absolute surface shape and initial surface shape is 0.03 nm(~λ/20000)without considering noise.Surface shape recovery under different numbers of translations and translation distances when considering Gaussian noise is then simulated and analyzed,and an experimental verification is performed for a rectangular plane mirror of 120 mm×40 mm.The measured absolute surface shape recovery is determined as 1.07 nm(λ/591)using the RMS of the absolute surface shape residual obtained by the three-plane method.Both simulations and experiments show that the proposed method can effectively obtain the 2D absolute surface shape of a high-precision rectangular planar mirror.Unidirectional translation thus lays the foundation for establishing multi-aperture stitching measurements based on absolute measurements.

关 键 词：光学测量 矩形平面镜 绝对检测 单向多次平移法 区域法重构 

分 类 号：TH74[机械工程—光学工程]