RB-SiC表面飞秒激光烧蚀与抛光工艺研究  

Study of Femtosecond Laser Ablation and Polishing Process on RB-SiC Surface

作　　者：陈欢 魏朝阳[1,2] 曹珍 彭小聪[1,2] 邵建达 Chen Huan;Wei Chaoyang;Cao Zhen;Peng Xiaocong;Shao Jianda(Precision Optical Manufacturing and Testing Center,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China;Center of Material Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院上海光学精密机械研究所精密光学制造与检测中心,上海201800 [2]中国科学院大学材料与光电研究中心,北京100049

出　　处：《中国激光》2023年第24期80-88,共9页Chinese Journal of Lasers

基　　金：国家自然科学基金天文联合基金重点(U1831211);上海市青年科技英才扬帆计划(20YF1454800)。

摘　　要：首先基于一维双温模型阐明了飞秒激光与RB-SiC表面的相互作用过程,并在此基础上,开展了RB-SiC表面飞秒激光烧蚀规律与抛光工艺研究。结果表明,通过改变脉冲能量、扫描速度、扫描间距等参数,可实现对烧蚀深度和烧蚀表面质量的有效调控。但是通过飞秒激光抛光难以在RB-SiC切割表面上获得较高的表面质量,而对于RBSiC预抛光表面,通过工艺参数调控,可将其表面粗糙度从36.9 nm抛光至11.56 nm,验证了飞秒激光抛光RB-SiC的可行性。Objective Reaction-bonded silicon carbide(RB-SiC)is considered one of the most excellent and feasible materials for lightweight large telescope optics owing to its high specific stiffness and strength.It has broad application prospects in ultra-high-resolution astronomical observation,deep space exploration,and space situational awareness.However,the material has high hardness and a complex two-phase structure,which leads to a complex surface polishing and modification treatment process,low efficiency,and high cost.This has become a bottleneck limiting its further development.Although this problem can be solved using a femtosecond laser,which is a highly promising method for high-precision processing,few applications involving femtosecond lasers in RB-SiC have been reported,and the interaction processes and ablation patterns with RB-SiC remain unclear.Therefore,this study elucidates the interaction process between the femtosecond laser and the RB-SiC surface based on the one-dimensional twotemperature model.On this basis,research on the femtosecond laser ablation law and polishing process on the RB-SiC surface is conducted.Methods RB-SiC is used in this study.First,the interaction process between the femtosecond laser and RB-SiC is clarified based on the two-temperature model.Second,the RB-SiC ablation law under the action of a femtosecond laser is studied experimentally,and the influence of various process parameters on the RB-SiC ablation during femtosecond laser scanning is analyzed.The process parameters for femtosecond laser polishing of the RB-SiC surface are preliminarily explored,providing a theoretical and experimental basis for its application as a polishing tool for RB-SiC surfaces.Results and Discussions The process of RB-SiC femtosecond laser ablation is elaborated based on the dual-temperature model(Fig.2),and the results show that during the interaction of the femtosecond laser with RB-SiC,the femtosecond laser pulse causes the electron temperature to rise sharply and transfers heat to the lattice

关 键 词：激光技术 粗糙度 反应烧结碳化硅 飞秒激光抛光 双温模型 

分 类 号：TN249[电子电信—物理电子学]