中心不重合径向剪切干涉迭代波前重构算法仿真分析  

Simulation analysis of iterative wavefront reconstruction algorithm for center-offset radial shearing interference

作　　者：杜旭升 白福忠[1,2] 徐永祥 王建新[3] DU Xusheng;BAI Fuzhong;XU Yongxiang;WANG Jianxin(School of Mechanical Engineering,Inner Mongolia University of Technology,Hohhot 010051,China;Inner Mongolia Key Laboratory of Special Service Intelligent Robotics,Hohhot 010051,China;Joint Laboratory for Extreme Conditions Matter Properties,Southwest University of Science and Technology,Mianyang 621010,China)

机构地区：[1]内蒙古工业大学机械工程学院,内蒙古呼和浩特010051 [2]内蒙古自治区特殊服役智能机器人重点实验室,内蒙古呼和浩特010051 [3]西南科技大学极端条件物质特性联合实验室,四川绵阳621010

出　　处：《应用光学》2024年第1期118-125,共8页Journal of Applied Optics

基　　金：国家自然科学基金(51765054,62165011);内蒙古自治区自然科学基金(2022MS0601);内蒙古自治区科技计划项目(2021GG0263)。

摘　　要：径向剪切干涉测量时经常会出现扩束与缩束光波中心不重合情况,传统波前重构算法会导致较大重构误差,其应用受到挑战。推导了中心不重合径向剪切干涉迭代波前重构算法,仿真分析了组合像差、单阶Zernike像差、中心偏移量大小及其计算误差对重构算法的影响。结果表明,在剪切光波中心不重合情况下,该文算法能够准确进行波前重构,重构效果显著优于传统算法;在论文仿真条件下,随着中心偏移量的增大,本文算法重构波面均方根误差(RMS)不高于0.05λ,而传统算法重构误差RMS值达1.6λ且与偏移量近似线性相关。In the measurement of radial shearing interference,the center-offset between beam expansion and beam shrinkage situation is a frequent event.In the case,the traditional wavefront reconstruction algorithms will introduce large reconstruction errors,and their applications are also challenged.The iterative wavefront reconstruction algorithm for center-offset radial shearing interference was derived.Through theoretical simulation,the influences of combined aberration,single-order Zernike aberrations,center offset and its calculation errors on reconstruction algorithms were analyzed.The results show that the proposed algorithm can accurately reconstruct the wavefront phase in the case of center offset between shearing beams,and its reconstruction accuracy is significantly better than that of traditional algorithm.Under the simulation conditions,the root mean square(RMS)value of wavefront error of the proposed reconstruction algorithm is not higher than 0.05λwith the increase of center offset.However,the reconstruction error of traditional algorithm reaches 1.6λ(RMS value)and is approximately linearly related to the center offset.

关 键 词：径向剪切干涉仪 迭代波前重构 中心不重合径向剪切 算法仿真 

分 类 号：O436.1[机械工程—光学工程]