高功率激光器光束质量测量的衰减缩束仿真研究  

Simulation of attenuation and compression in beam qualitymeasurement of high power laser

作　　者：单小琴 李天昊 朱日宏[3] SHAN Xiaoqin;LI Tianhao;ZHU Rihong(School of Electronic and Optical Engineering,Nanjing University of Science and Technology Zijin College,Nanjing 210023,China;Tianjin Jinhang Institute of Technical Physics,Tianjin 300308,China;School of Electronic and Optical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China)

机构地区：[1]南京理工大学紫金学院电子工程与光电技术学院,江苏南京210023 [2]天津津航技术物理研究所,天津300308 [3]南京理工大学电子工程与光电技术学院,江苏南京210094

出　　处：《应用光学》2024年第1期199-205,共7页Journal of Applied Optics

基　　金：国家自然科学基金(61875087);南京理工大学紫金学院校级科研项目(2022ZXKX0401008)。

摘　　要：光束质量因子M^(2)是表征高功率激光器横模特性的主要参数,针对目前光束质量分析仪只能用于小口径、低功率激光器光束质量评估的问题,开展了高功率激光器光束质量测量的衰减缩束技术原理与仿真研究。建立了衰减缩束组件的仿真模型,利用有限元的方法对光学元件在高功率激光下的热致像差进行研究,得出热致像差的峰谷(PV)值小于82 nm时,对光束质量因子的影响小于5%。当光束通过衰减组件时,如果发生退偏,光束质量因子将偏小。基于泽尼克多项式和光束质量因子计算模型,研究分析了缩束组件波前畸变对测量的影响,并通过Zemax仿真分析看出,在装调时入射光与缩束组件中心光轴夹角视场小于7°时,对光束质量因子测量的影响小于5%。Beam M^(2) quality factor is the main parameter to characterize the transverse-mode property of highpower laser.In view of the problem that beam quality analyzer can only be used to evaluate the beam quality ofsmall caliber and low power laser,the principle and simulation of attenuation and compression technology ofbeam quality measurement of high power laser were studied.The simulation model of attenuation andcompression module was established,and the thermal aberration of optical component under high power laserwas studied by finite element method.The results show that the effect of the thermal aberration on the beamquality factor is less than 5%when the peak and valley(PV)value is less than 82 nm.If depolarization occurswhen the beam passes through the attenuation component,the beam quality factor will be smaller.Theinfluence of wavefront distortion caused by compression module on beam quality factor measurement wasanalyzed based on Zernick polynomial and beam quality factor calculation model.Through the Zemaxsimulation,the influence on beam quality factor measurement is less than 5%when the field of view betweenthe incident light and the center optical axis of the attenuation and compression module is less than 7°.

关 键 词：高功率激光器 光束质量因子 衰减组件 缩束组件 

分 类 号：TN242[电子电信—物理电子学]