二硫化钼在电子束辐照下的缺陷结构演变及其物理机制研究进展  

Research Progress on Defect Structure Evolution and the Corresponding Physical Mechanisms of Molybdenum Disulfide Under Electron Beam Irradiation

作　　者：季雪梅 郝驰 朱秀梅 苏江滨[1,2,3] 何祖明 唐斌[1] 朱贤方[2] JI Xuemei;HAO Chi;ZHU Xiumei;SU Jiangbin;HE Zuming;TANG Bin;ZHU Xianfang(Experimental Center of Electronic Science and Technology,School of Microelectronics and Control Engineering,Changzhou University,Changzhou 213159,Jiangsu,China;China-Australia Joint Laboratory of Functional Nanomaterials,School of Physical Science and Technology,Xiamen University,Xiamen 361005,Fujian,China;Key Laboratory of MEMS Education Department,School of Electronic Science and Engineering,Southeast University,Nanjing 210096,China)

机构地区：[1]常州大学微电子与控制工程学院,电子科学与技术实验中心,江苏常州213159 [2]厦门大学物理科学与技术学院,中国-澳大利亚功能纳米材料联合实验室,福建厦门361005 [3]东南大学电子科学与工程学院,MEMS教育部重点实验室,南京210096

出　　处：《材料导报》2024年第3期20-30,共11页Materials Reports

基　　金：江苏省基础研究计划(自然科学基金)(BK20191453);江苏省研究生科研创新计划(KYCX21_2825,KYCX21_2819)。

摘　　要：二硫化钼(MoS_(2))丰富的多原子结构赋予了它优异的电学、光学、催化等性能,这引起了人们的极大兴趣。而MoS_(2)中存在的缺陷结构往往会对其性能产生显著的影响,通常认为这种影响是负面的,因此以往的研究几乎都是在尽量避免缺陷结构的产生。但是最近也有一些研究表明MoS_(2)缺陷的存在对其应用起到了积极作用。为了能够更好地利用MoS_(2)的缺陷结构,使其产生积极影响,首先需要了解这些缺陷结构,弄清楚它们的演变方式和相关物理机制,并用来指导MoS_(2)的可控纳米加工和实际应用。本文总结了MoS_(2)不同类型的缺陷结构以及在电子束辐照下MoS_(2)的结构演变行为,从中探究电子束与MoS_(2)缺陷结构交互作用的机理。通过分析传统物理机制的不足,提出了两个全新的概念——纳米曲率效应和电子束非热激活效应,分别从纳米空间限制角度和超快时间限制角度来挖掘这些实验现象背后的深层物理机制。最后,本文还提出了对MoS_(2)缺陷结构调制与纳米可控加工的看法和展望。The rich polyatomic structures of molybdenum disulfide(MoS_(2))bestow upon it with excellent electrical,optical,and catalytic properties,arousing great interest.The defect structures in MoS_(2)often have a significant impact on its performance,which is generally considered to be negative.Therefore,previous studies aimed at avoiding the occurrence of defect structures.However,some recent studies have shown that MoS_(2)defects also have positive significance in their applications.To better leverage the defect structures of MoS_(2)and harness their positive impact,it is first necessary to understand these defect structures,their evolution modes and related physical mechanisms,and use them to guide the controllable nanoprocessing and practical applications.In this review,the authors summarize the different types of defect structures in MoS_(2)and the structural evolution behavior of MoS_(2)under electron beam irradiation,and then explore the mechanisms of the interaction between electron beam and MoS_(2)defect structures.By analyzing the limitations of traditional physical mechanisms,the authors propose two new concepts—nanocurvature effect and non-thermal activation effect to delve into the underlying physical mechanisms of these experimental phenomena.This exploration is conducted from the perspectives of nano-space limitation and ultrafast time limitation.Finally,the authors present their perspectives and prospects on defect structure modulation and controllable nanoprocessing of MoS_(2).

关 键 词：二硫化钼(MoS_(2)) 缺陷结构 结构演变 物理机制 透射电子显微镜 

分 类 号：O766.1[理学—晶体学]