基于MEDICI软件的高维持电流SCR器件的仿真优化  

Simulation and optimization of high holding current SCR devices based on MEDICI software

作　　者：刘继芝[1] 彭钰航 刘志伟[1] LIU Jizhi;PENG Yuhang;LIU Zhiwei(School of Integrated Circuit Science and Technology(Exemplary School of Microelectronics),University of Electronic Science and Technology of China,Chengdu 610054,China)

机构地区：[1]电子科技大学集成电路科学与工程学院(示范性微电子学院),四川成都610054

出　　处：《实验技术与管理》2023年第12期99-106,共8页Experimental Technology and Management

基　　金：国家自然科学基金项目(61974017)。

摘　　要：为了设计满足不同静电放电(ESD)设计窗口需求的可控硅整流器(SCR)器件,提出一种提高ESD用SCR器件维持电流的方法。该方法基于器件仿真软件MEDICI,通过仿真分析SCR器件在ESD工作条件下的内部电流流向、载流子分布和电导调制过程,从器件尺寸、掺杂浓度和电流路径三个方面对SCR器件的维持电流进行了仿真优化。仿真结果表明,优化后的SCR器件的维持电流增大了10倍。该仿真优化方法可以提高学生的器件仿真能力,同时使他们对微电子器件的优化设计过程有更加直观和全面的认识。To design SCR devices that can meet the requirements of different electrostatic discharge(ESD)design windows,a method is proposed to improve the holding current of SCR devices for ESD protection.This method is based on the device simulation software MEDICI.By simulating and analyzing the current flow direction,carrier distribution,and conductivity modulation process of SCR devices under ESD operating conditions,the holding current of SCR devices was optimized from three aspects:device size,doping concentration,and current path.The simulation results demonstrate that the holding current of the optimized SCR device has increased by 10 times.This simulation optimization method can improve students’device simulation ability and provide them with a more intuitive and comprehensive understanding of the optimization design process of microelectronic devices.

关 键 词：静电放电 可控硅整流器 维持电流 

分 类 号：TN305[电子电信—物理电子学]