基于激光诱导等离子体的真空开关真空度检测稳定性研究  

Research on Stability of Vacuum Detection for Vacuum Switch Based on Laser Induced Plasma

作　　者：柯伟 袁欢[1] 刘佳琪 王小华[1] 杨爱军[1] 荣命哲[1] KE Wei;YUAN Huan;LIU Jiaqi;WANG Xiaohua;YANG Aijun;RONG Mingzhe(School of Electrical Engineering,Xi'an Jiaotong University,Xi'an 710049,China)

机构地区：[1]西安交通大学电气工程学院,西安710049

出　　处：《高电压技术》2024年第2期561-569,共9页High Voltage Engineering

基　　金：国家自然科学基金(51777145);博士后基金(2020M683481)。

摘　　要：基于激光诱导等离子体成像的真空开关真空度检测方法是一种非接触式真空度检测方法,有望实现安全可靠的真空开关真空度带电检测。但是,激光诱导等离子体的演化是一个十分复杂的物理过程,激光能量、等离子体测量延迟时间等因素直接影响了等离子体成像,对等离子体成像稳定性的影响需要进行更加深入的研究。为此采用相对标准偏差研究了等离子体成像平均次数、激光能量和等离子体测量延迟时间等对等离子体图像和等离子体辐射强度积分稳定性的影响。结果显示,多次成像平均得到的等离子体图像和辐射强度积分不随平均次数发生明显变化,可用于表征真空度。更重要的是,等离子体辐射强度积分的相对标准偏差随平均次数和激光能量的增加而单调下降,随延迟时间的增加而增大,这意味着对等离子体进行多次成像平均,增加激光能量,减小等离子体成像的延迟时间可以提高等离子体辐射强度积分的稳定性,有利于提高真空度检测精度。该研究为基于激光诱导等离子体成像的真空开关真空度检测方法的参数优化提供了指导,为该方法的实际工程应用奠定了实验基础。The vacuum degree detection method for vacuum switches based on laser-induced plasma imaging is a non-contact approach that holds promise for achieving safe and reliable online monitoring of vacuum degree in vacuum switches.However,the evolution of laser-induced plasma is a highly complex physical process,where factors such as la-ser energy and delay time of plasma measurement directly impact plasma imaging.The influence of these factors on the stability of plasma imaging needs to be further studied.In this study,the effects of laser energy,average times of plasma imaging,plasma measurement delay time on the stability of plasma imaging and integral of plasma radiation intensity are investigated.Experimental results demonstrate that the plasma imaging and plasma radiation intensity integral do not change significantly with the average times of plasma imaging,which can be used to characterize vacuum degree.Fur-thermore,the relative standard deviation of the plasma radiation intensity integral displays a monotonic decrease with increasing of average times and laser energy,while it increases with delay time.This suggests that enhancing the stability of plasma radiation intensity integral can be achieved by imaging the plasma multiple times and then averaging,increas-ing laser energy,while reducing the delay time for plasma imaging.These findings contribute to improving the accuracy of vacuum degree detection.This study provides guidance for parameter optimization in the vacuum degree detection method based on laser-induced plasma imaging for vacuum switches,and establishes an experimental foundation for its practical engineering application.

关 键 词：真空开关 真空度检测 激光诱导等离子体 等离子体辐射强度积分 等离子体稳定性 

分 类 号：TM564[电气工程—电器] TN249[电子电信—物理电子学]