两种方法处理IC基板制造络合铜废水的对比研究  

Comparative Study of Two Methods for Removing Chelated Copper from Integrated Circuit Board Manufacture Waster Water

作　　者：阚志超 匡武[1,2] 彭书传 KAN Zhi-chao;KUANG Wu;PENG Shu-chuan(School of Resources and Environmental Engineering,Hefei University of Technology,Hefei 230009,China;Anhui Academy of Ecology and Environmental Sciences,Hefei 230022,China)

机构地区：[1]合肥工业大学资源与环境工程学院,安徽合肥230009 [2]安徽省生态环境科学研究院,安徽合肥230022

出　　处：《安徽化工》2023年第6期85-89,共5页Anhui Chemical Industry

基　　金：安徽省环保科研基金资助项目(HKYKY05-2021);安徽省环保专项补助资金资助项目(GN2022-18-3865)。

摘　　要：集成电路板(integrated circuit,IC)基板制造过程中会产生含络合铜化合物的各类废水。随着国内环保意识的提高和行业废水排放监管的加强,IC基板制造行业废水的有效处理成为亟待解决的问题。使用硫酸亚铁法和TMT-15(即Na_(3)(C_(3)N_(3)S_(3))-9H_(2)O晶体的15%水溶液)法对含络合铜废水进行破络除铜,在确定两种方法最佳运行工况的基础上,结合药剂成本进行了对比。结果表明,硫酸亚铁法和TMT-15法均可有效破络除铜,出水总铜含量达到《电镀污染物排放标准》(GB 21900—2008)的排放要求(低于0.5 mg/L),其药剂处理成本分别为1.44元/t和1.34元/t。The integrated circuit(IC)board manufacturing process produces various types of wastewater containing complexed copper compounds.With the increasing awareness of environmental protection in China and the strengthening of the regulation of wastewater discharge in the industry,the effective treatment of wastewater from the IC board manufacturing industry has become an urgent issue to be solved.The article uses ferrous sulfate method and TMT-15(i.e.15% aqueous solution of Na_(3)(C_(3)N_(3)S_(3))-9H_(2)O crystals)method for complexed copper-containing wastewater to break the complex and remove copper,and the comparison is made based on the determination of the best operating conditions of the two methods combined with the cost of chemicals.The results showed that both the ferrous sulphate method and the TMT-15 method could effectively break the complex and remove copper,and the total copper content of the effluent met the discharge requirements of the Electroplating Pollutant Discharge Standard(GB 21900—2008)(less than 0.5 mg/L),and their chemical treatment costs were 1.44 Yuan/t and 1.34 Yuan/t respectively.

关 键 词：IC基板制造 络合铜废水 破络除铜 硫酸亚铁法 TMT-15法 

分 类 号：X703.5[环境科学与工程—环境工程]