原子力显微镜-扫描电子显微镜共定位表征系统的研发与应用  

Development and Application of Atomic Force Microscope-Scanning Electron Microscope Co-positioning Characterization System

作　　者：蔡蕊[1] 万鹏[1] 徐强[1] 吕天明 孙智广 CAI Rui;WAN Peng;XU Qiang;LV Tianming;SUN Zhiguang(Instrumental Analysis Center,Dalian University of Technology,Dalian 116024,Liaoning China)

机构地区：[1]大连理工大学分析测试中心,辽宁大连116024

出　　处：《分析测试技术与仪器》2024年第1期53-57,共5页Analysis and Testing Technology and Instruments

基　　金：大连理工大学大型设备开发改造项目(SYSWX202205)。

摘　　要：微纳加工过程中,常有样品需要进行聚焦离子束(FIB)溅射、切割,扫描电子显微镜(SEM)以及原子力显微镜(AFM)表征,而这三类仪器都需要将样品固定在样品台上才可测试,固定不佳会影响表征结果.但固定好的样品在不同仪器之间转移、拆卸、再固定的过程中极易受到破坏.基于以上问题,设计了AFM-SEM-FIB样品共定位系统,可实现样品在此三种仪器之间的无损转移及共定位,避免珍贵样品破坏及目标丢失,以及解决AFM扫描无法控制方向、迅速调整位点等问题.在微纳表征中有优异的表现,系统已被开发成产品并量产销售.In the process of micro-nano machining,samples often need to be sputtered and cut by focused ion beam(FIB),and characterized by scanning electron microscope(SEM)and atomic force microscope(AFM).Samples need to be fixed on the sample table before tested by these three instruments.However,poor fixation will affect the characterization results,but the firmly fixed samples are easy to be destroyed in the process of transfer,disassembly and re-fixation between different instruments.Based on the above problems,the AFM-SEM-FIB sample co-positioning system was designed,which could realize non-destructive transfer and co-positioning of samples between the three instruments,and avoid the precious samples destruction and loss of targets.And the problems were solved that AFM scanning cannot control the direction and quickly adjust the location.With excellent performance in micro-nano characterization,the system has been developed into products and sold in large quantities.

关 键 词：共定位系统 原子力显微镜 扫描电子显微镜 聚焦离子束 微纳表征 

分 类 号：O657[理学—分析化学] TH742[理学—化学]