对准系统的Z向串扰解决方案  

Solution of Crosstalk Caused by Z-direction for Alignment System

作　　者：王朝宇 申淙 杨宇翔 杜婷婷 林佳 李林 WANG Zhaoyu;SHEN Cong;YANG Yuxiang;DU Tingting;LIN Jia;LI Lin(The 45th Research Institute of CETC,Beijing 100176,China)

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176

出　　处：《电子工业专用设备》2023年第6期47-52,110,共7页Equipment for Electronic Products Manufacturing

摘　　要：在对准系统中,相机可以在焦深范围内采集到清晰的标记图像。当相机安装存在微小倾斜角度时,照明光束不能垂直照射在标记平面上,导致相机拍摄的标记中心相对于视场中心的偏移量会随着焦面高度的微小变化会发生细微的变化。尽管使用相同的图像处理算法,标记在焦深范围内的不同焦面高度下的水平向对准位置有所差异,这严重影响了设备的水平向对准性能。为保证设备的对准精度,提出一种校正光束倾斜的方法至关重要。因此,提出了一种基于坐标系转换的Z向串扰解决方案,以实现对系统的光束倾斜校正,从而使水平对准位置不受Z向高度影响。In the alignment system,the camera can take a clear picture in the focal depth.If the camera is slightly tilted,the lighting beam will not vertically align on the mark.With the small change in the focal height,the position of the mark has a slight change in the camera field.Although the same image processing technique is used,the horizontal measurement position of the same mark is different under different focal surfaces of the focal depth,which seriously affects the performance of the horizontal alignment device.Therefore,it is important to propose a method of correcting the beam tilt to ensure the accuracy of the equipment.In this paper,a circular alignment algorithm based on the transformation of the coordinate system is proposed to correct the beam tilt of the system,so that the horizontal alignment position is not affected by the Z-axis height.

关 键 词：对准系统 光束倾斜校正 坐标系转换 Z向串扰 焦深范围 

分 类 号：TN307[电子电信—物理电子学]