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作 者:董丽坤 李树彦 崔晓兵 刘阳 范少峰 DONG Likun;LI Shuyan;CUI Xiaobing;LIU Yang;FAN Shaofeng(The 45th Research Institute of CETC,Beijing 100176,China)
机构地区:[1]中国电子科技集团公司第四十五研究所,北京100176
出 处:《电子工业专用设备》2024年第1期69-74,共6页Equipment for Electronic Products Manufacturing
摘 要:为保证半导体精密运动设备内精密温度控制模块的精度及稳定性,建立了负载电机冷却水热时间常数理论计算模型,用于计算电机工作时的最大热负荷梯度,为精密温度控制模块选型提供依据。理论模型表明冷却水热时间常数主要受电机结构、材料热物性和冷却水流量影响。仿真结果表明,电机冷却水温度随时间变化基本符合时间常数理论模型,冷却水时间常数与电机热功率无关,但随着电机冷却水流量的减小而增大,仿真值与理论模型计算差值为27%。实验结果与仿真结果基本一致,相同工况下仿真与实验得到的冷却水时间常数最大差值为7%。To ensure the accuracy and stability of the precision temperature control unit in semiconductor precision motion equipment,a time constant theoretical model of cooling water in electric motor is established to compute the max heat load gradient of electric motor,providing a basis for the selection of precision temperature control unit.The theoretical model shows that the thermal time constant of cooling water is mainly influenced by the motor structure,material,and flow rate of cooling water.The numerical simulation results show that the temperature change of cooling water over time accord with the time constant theoretical model.The cooling water time constant is independent of the motor thermal power,but increases as water flow decreases.The difference of time constant between numerical simulation and theoretical calculation is 27%.The experimental results are consistent with the numerical simulation results.the max difference of time constant between numerical simulations and experiments is 7%during the same operation status.
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