隔热环的位置对直拉单晶硅氧含量的影响  

Effects of the Position of Insulation Rings on Oxygen Contents of Czochralski Single Crystals

作　　者：王新强 景华玉 王小亮 刘利国 周涛 万军军 张正 WANG Xinqiang;JING Huayu;WANG Xiaoliang;LIU Liguo;ZHOU Tao;WAN Junjun;ZHANG Zheng(Shuangliang Silicon Material(Baotou)Co.,Ltd.,Baotou 014060,China)

机构地区：[1]双良硅材料(包头)有限公司,内蒙古包头014060

出　　处：《新技术新工艺》2024年第1期73-76,共4页New Technology & New Process

基　　金：创新平台(基地)科技计划项目(XM2022BT11)

摘　　要：应用STR公司研发的专业晶体生长软件CGSim对单晶炉内热场结构进行优化。结果表明,通过在主加热器下部安装隔热环,可有效降低熔体底部的温度,减弱熔体内的对流强度,降低熔体与石英坩埚反应的程度,减少氧杂质传输分凝到晶棒的氧含量。另外,隔热环与主加热器的垂直距离(器环距)与晶棒内的氧含量有一定直接关系。结果表明,随着器环距的增加,抑制熔体对流的作用就越弱;当隔热环位置低于石英坩埚底部时,隔热环的降氧效果将失去。合理地设计器环距能抑制石英坩埚氧杂质的分解,降低晶棒的氧含量。模拟结果显示,当器环距为30 mm时,氧含量最大降低0.6 ppma。We used the professional crystal growth software CGSim developed by STR company to optimize the thermal field structure in a single crystal furnace.The results indicated that installing an insulation ring at the lower part of the main heater could effectively reduce the temperature at the bottom of the melt,weakened the convective strength inside the melt,reduced the degree of reaction between the melt with the quartz crucible,and reduced the oxygen contents of oxygen impurities transported and condensed into the crystal rod.In addition,the vertical distance between the insulation ring and the main heater was directly related to the oxygen content inside the crystal rod.The results showed that as the distance between the rings increased,the effect of suppressing melt convection becomed weaker;When the position of the insulation ring was lower than the bottom of the quartz crucible,the oxygen reduction effect of the insulation ring would be lost.Reasonably designing spacing could suppress the decomposition of oxygen impurities in quartz crucibles and reduce the oxygen content of crystal rods.The simulation results showed that when the annular distance was 30 mm,the oxygen content decreased by a maximum of 0.6 ppma.

关 键 词：隔热环 器环距 熔体对流 分凝 氧含量 

分 类 号：TN304[电子电信—物理电子学]