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作 者:Feng-Shuo Xu Hao Cui Man-Men Liu Jia-Lin Chen Ming Wen Chuan-Jun Wang Wei Wang Song Li Xu-Dong Sun Shao-Hong Liu
机构地区:[1]Key Laboratory for Anisotropy and Texture of Materials(Ministry of Education),School of Materials Science and Engineering,Northeastern University,Shenyang 110819,China [2]State Key Laboratory of Advanced Technologies for Comprehensive Utilization of Platinum Metals,Yunnan Precious Metals Laboratory Co.,Ltd.,Kunming 650106,China
出 处:《Rare Metals》2023年第12期4246-4254,共9页稀有金属(英文版)
基 金:financially supported by the National Natural Science Foundation of China (Nos.51977027 and51967008);Yunnan Key Research and Development Program (No.202102AB080008);the Fundamental Research Funds for the Central Universities (Nos.N2002007 and N182508026);the Open Project of Yunnan Precious Metals Laboratory Co.,Ltd. (No.YPML-2023050250);the State Key Laboratory of AdvancedTechnologies for Comprehensive Utilization of Platinum Metals (No.SKL-SPM-202014 and SKL-SPM-202015)。
摘 要:Monodispersed spherical Ru powders are essential for fabricating high-performance Ru sputtering targets,which have applications in very-large-scale integration circuits and magnetic recording devices.However,the synthesis of such powders remains a major challenge.Here,we reported the synthesis of monodispersed spherical Ru powders through controlling the molar ratio of SO_(4)^(2-)to Ru^(3+)in urea homogeneous precipitation solution and the annealing conditions.Without the addition of(NH4)2SO_(4)into the reaction solution,only gel-like precipitation particles were obtained.Once introducing(NH_(4))_(2)SO_(4) into the reaction solution and controlling the molar ratio of SO_(4)^(2-)to Ru3+between 0.50 and 1.00,monodispersed spherical precursor powders were obtained.The nucleation and growth of monodispersed spherical precursor particles in solution were found to conform to LaMer's model.Through controlled annealing at 450℃in a hydrogen atmosphere,the obtained metallic Ru powder with an average particle size of 135 nm inherited the spherical morphology and excellent dispersity from the monodispersed spherical precursor powders.These results and findings would deepen the understanding of the preparation of monodispersed Ru and Ru-like powders.
关 键 词:RUTHENIUM Sputtering target Spherical powder Integration circuits Magnetic recording
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